Process systems for wet-chemical applications: wet process systems, chemical supply systems and special-purpose systems made in our own production.
atp GmbH
Ötzingen, WesterwaldNew on Amplifa
About atp GmbH
atp GmbH (advanced technology process) has been developing and manufacturing process, production and laboratory systems for the semiconductor industry, solar industry and special-purpose machinery engineering since 1992. The range of services includes wet process systems (manual wet benches, semi-automatic and automatic systems for etching and cleaning silicon wafers up to 12"), chemical supply systems with redundant design, mixing and dosing systems, disposal modules, drying systems such as IPA dryers and spin rinse dryers, as well as customer-specific special-purpose systems such as tube cleaners for quartz tubes and systems for wastewater neutralisation. All steps of the process chain – planning, engineering, process and electrical engineering, PLC programming, manufacturing, acceptance and commissioning – are carried out in-house. The Ötzingen site in the Westerwald region offers 1,200 m² of production space as well as a 60 m² cleanroom for final assembly. In addition, the company carries out refurbishment of legacy tools (SAT/SST).
- Site
- Ötzingen
- Processes
- Wet process systems / wet benches (etching and cleaning of silicon wafers), Manual wet process systems, Semi-automatic wet process systems / front-end cleaning system, Automatic wet bench, Laboratory fume hoods for cleanroom and laboratory areas, Chemical supply systems (high-purity chemical supply), Disposal modules (disposal cabinets for acids/alkalis, solvents), Mixing and dosing systems for etching solutions (solvents, alkalis)
- Materials
- Silicon wafers, Quartz (process tubes), PFA (wetted, piping), PVDF, PP (PP white, FM4910), PE, PVC white (FM4910), Plastic components and assemblies (SemiPlast cooperation)
- Certificates
- Cleanroom final assembly
- Founded
- 1992
- Industries
- Semiconductor industry, Solar industry, Special-purpose machinery engineering, Research & Development, Medical technology, Automotive
- 01
Planning & Engineering
- 02
Process & Electrical Engineering (E&I)
- 03
Programming & Automation (PLC)
- 04
Manufacturing & Cleanroom Assembly
- 05
Installation & Commissioning
- 06
Service & Support
Materials & Process Engineering
PFA
Wetted components and piping in chemical supply systems.
PVDF
Wetted piping, valves and housing components for high-purity chemicals.
PP white (FM4910)
Housing of the chemical supply systems with safety drip tray and leak sensor.
PE
Wetted components in chemical supply systems.
PVC white (FM4910)
Housing variant for disposal and supply modules.
Quartz
Process tubes in tube cleaners for tube cleaning.
Silicon wafers
Etching and cleaning of wafers up to 12" in wet process systems.
Plastic components & assemblies
Manufacturing and assembly through the SemiPlast cooperation.
Ötzingen Site
Ötzingen
DEProduction, engineering, cleanroom final assembly
- Materials
- PFA, PVDF, PP, PE, PVC, quartz
- Manual wet process system MWP new generation
- Semi-automatic wet process bench (up to 12" wafers)
- Automatic wet bench
- Laboratory fume hoods
- Chemical supply system smart line (200–1000 L)
- Disposal cabinets for acids/alkalis and solvents
- Mixing and dosing system atp smart line
- IPA dryer (up to 8" wafers)
- Spin rinse dryer
- SAT and SST systems
- Horizontal tube cleaner
- Vertical quartz tube cleaning system
- 60 m² cleanroom for final assembly
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Wet process systems / wet benches (etching and cleaning of silicon wafers)Surface | – | – | – | – | Silicon wafers |
| Manual wet process systemsSurface | – | – | – | – | Silicon |
| Semi-automatic wet process systems / front-end cleaning systemSurface | – | Wafers up to 12" | – | – | Silicon |
| Automatic wet benchSurface | – | – | – | – | Silicon |
| Laboratory fume hoods for cleanroom and laboratory areasSurface | – | – | – | – | – |
| Chemical supply systems (high-purity chemical supply)Engineering | – | – | – | Chemical supply 200 L – Chemical supply 1000 L | PFA, PVDF, PP, PE |
| Disposal modules (disposal cabinets for acids/alkalis, solvents)Engineering | – | – | – | 200 L – 1000 L | – |
| Mixing and dosing systems for etching solutions (solvents, alkalis)Engineering | – | – | – | – | – |
| IPA dryers for wafersSurface | – | Wafers up to 8" | – | – | Silicon |
| Spin Rinse DryerSurface | – | – | – | – | Silicon |
| Refurbishment of legacy tools (SAT/SST systems) with new controls and visualisationEngineering | – | – | – | – | – |
| SAT systems (spray systems for etching/cleaning tasks, oxide layer removal, photoresist stripping,Surface | – | – | – | – | Silicon |
| SST systemsSurface | – | – | – | – | – |
| Tube cleaner for cleaning quartz tubes (horizontal/vertical)Surface | – | – | – | – | Quartz |
| Systems for neutralisation and filtration of chemical wastewaterEngineering | – | – | – | – | – |
| Process solutions for CMP wastewaterEngineering | – | – | – | – | – |
| Customer-specific special-purpose systems for surface treatment and wet-chemical processesEngineering | – | – | – | – | – |
| Wet process systems for solar cell manufacturingSurface | – | – | – | – | Silicon |
| Planning & Engineering / mechanical designEngineering | – | – | – | – | – |
| Process & Electrical Engineering (system construction, E&I technology)Engineering | – | – | – | – | – |
| Programming & Automation (circuit diagram creation, PLC programming)Engineering | – | – | – | – | – |
| Installation, commissioning, cleanroom assembly & serviceAssembly | – | – | – | – | – |
17 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Manual wet process system / wet bench | atp GmbH MWP new generation | – | – | – | Ötzingen |
| Semi-automatic wet process bench | atp GmbH | – | Cleaning tool up to 12" wafers; etch tool for 6"/8" wafers | – | Ötzingen |
| Automatic wet bench | atp GmbH | – | – | – | Ötzingen |
| Laboratory fume hood | atp GmbH | – | – | – | Ötzingen |
| Chemical supply system | atp GmbH smart line | – | Chemical supply 200–1000 L | – | Ötzingen |
| Acid/alkali disposal cabinet | atp GmbH | – | 200 L and 1000 L | – | Ötzingen |
| Solvent disposal cabinet | atp GmbH | – | – | – | Ötzingen |
| Mixing and dosing system | atp GmbH atp smart line | – | – | – | Ötzingen |
| IPA dryer | atp GmbH | – | Wafers up to 8" | – | Ötzingen |
| Spin Rinse Dryer | atp GmbH | – | – | – | Ötzingen |
| SAT system (spray etching/cleaning system) | atp GmbH | – | – | – | Ötzingen |
| SST system | atp GmbH | – | – | – | Ötzingen |
| Horizontal tube cleaner (quartz tube cleaning) | atp GmbH | – | – | – | Ötzingen |
| Vertical quartz tube cleaning system | atp GmbH | – | – | – | Ötzingen |
| PLC control with visualisation | Siemens TIA Portal | – | – | – | – |
| Pneumatic components | Festo / SMC | – | – | – | – |
| Cleanroom for final assembly | – | 1 | 60 m² cleanroom; 1,200 m² production floor space | – | Ötzingen |
Additional services
Quality
Engineering, design, process development, automation and manufacturing work closely together to create reproducible process solutions; sensitive systems are finally assembled in our own 60 m² cleanroom.
| Evidence | Ötzingen |
|---|---|
| Cleanroom final assembly |
Company History
- 1992
atp GmbH founded by Peter Becker and Michael Manns in Wirges, Westerwald.
- 1995
Production start at the Ötzingen site.