Develops custom plasma systems for cleaning, coating and etching as well as high-frequency components.
AURION Anlagentechnik GmbH
SeligenstadtNew on Amplifa
About AURION
AURION Anlagentechnik GmbH, based in Seligenstadt, develops and manufactures specific plasma systems and plasma technology components. The portfolio includes atmospheric-pressure plasma sources (KIVOS concept), systems for atmospheric sputtering, reactive ion etching (RIE), microwave downstream plasma, PVD sputtering systems and PECVD systems, including cluster and inline solutions. In addition, the company offers high-frequency components such as automatic impedance matching networks (matchboxes), switches, filters, power splitters and phase shifters as well as RF systems for particle accelerators. Every system is developed as part of a customer-specific project cycle in close coordination with the customer. AURION also provides consulting services and training in the fields of plasma and high-frequency technology. Customers include research institutions (Big Science, particle accelerators) as well as surface and vacuum technology.
- Site
- Seligenstadt
- Processes
- Plasma cleaning, Plasma coating, Atmospheric-pressure plasma sources, Atmospheric-pressure sputtering, RIE (Reactive Ion Etching), PECVD, Microwave downstream plasma, PVD (sputtering)
- Materials
- Atmospheric-pressure plasma (KIVOS), Reactive Ion Etching, Microwave Downstream Plasma, PVD Sputtering, PECVD, High-frequency components
- Industries
- Big Science / Research (particle accelerators), Surface technology / Vacuum technology
- 01
Consulting and requirements analysis
- 02
Development of the custom system
- 03
Manufacturing and assembly of plasma and RF components
- 04
Commissioning
- 05
Service and training
Processes and Technologies
Atmospheric-pressure plasma (KIVOS)
Atmospheric-pressure plasma sources and sputtering for surface pretreatment without a vacuum chamber.
Reactive Ion Etching
RIE systems for targeted etching and fine cleaning of surfaces.
Microwave Downstream Plasma
Downstream plasma systems for gentle treatment of even sensitive surfaces.
PVD Sputtering
Sputtering systems for applying thin films in a vacuum.
PECVD
Plasma-enhanced chemical vapor deposition for functional coatings.
High-frequency components
Impedance matching networks, switches, filters, power splitters and phase shifters for plasma and accelerator applications.
Locations
Seligenstadt
DEHeadquarters: development, manufacturing and sales
- KIVOS atmospheric-pressure plasma system
- RIE system
- Microwave downstream plasma system
- PVD sputtering system
- PECVD system
- Cluster and inline systems
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Plasma cleaningSurface | – | – | – | – | – |
| Plasma coatingSurface | – | – | – | – | – |
| Atmospheric-pressure plasma sourcesSurface | – | – | – | – | – |
| Atmospheric-pressure sputteringSurface | – | – | – | – | – |
| RIE (Reactive Ion Etching)Surface | – | – | – | – | – |
| PECVDSurface | – | – | – | – | – |
| Microwave downstream plasmaSurface | – | – | – | – | – |
| PVD (sputtering)Surface | – | – | – | – | – |
| Low-pressure plasmaSurface | – | – | – | – | – |
6 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Atmospheric-pressure plasma system | AURION KIVOS | – | – | – | Seligenstadt |
| RIE system | AURION | – | – | – | Seligenstadt |
| Microwave downstream plasma system | AURION | – | – | – | Seligenstadt |
| PVD sputtering system | AURION | – | – | – | Seligenstadt |
| PECVD system | AURION | – | – | – | Seligenstadt |
| Cluster and inline systems (plasma) | AURION | – | – | – | Seligenstadt |
Additional services