Automation and contamination control solutions for the semiconductor and life science industries
Brooks Automation
Chelmsford, MA (USA) · Steißlingen (DE) · Dresden (DE) · Tagerwilen (CH) · Austin, TX (US) · Fremont, CA (US) · Livermore, CA (US) · Yokohama, Yokkaichi (JP) · Hwaseong-Si, Yongin-Si (KR) · Shanghai,New on Amplifa
About Brooks Automation
Brooks Automation is a globally active provider of automation and contamination control solutions headquartered in Chelmsford, Massachusetts (USA). The company develops and manufactures vacuum robots (MagnaTran®), modular vacuum systems (Marathon®), load port and SMIF interface systems, and automation solutions for advanced packaging, reticle management and laboratory automation. More than 100,000 Brooks automation solutions operate around the clock in semiconductor fabs; over 70,000 delivered robots transport an estimated 50 billion wafers per year. The solution portfolio is built on competencies in mechatronics, materials science, thermodynamics, vision, robotics and surface technology. Brooks serves semiconductor manufacturers, OEMs and life science customers through a global network of development, manufacturing, service and support sites. In Germany, the company maintains locations in Steißlingen and Dresden. In addition to new developments, Brooks offers repair, refurbishment, upgrades, diagnostics and lifecycle support for installed systems through Pathway™ Service.
- Site
- Chelmsford, MA, USA
- Processes
- Vacuum Automation – precise substrate transport in vacuum environments, Advanced Packaging Automation, Contamination Control – measuring, analyzing, cleaning and protecting critical carriers, Interface Automation – material flow and factory integration (load ports, SMIF, EUV reticle, Reticle Management & Lithography Automation, Lab Automation – laboratory workflows, sample handling, analytical processes, Pathway™ Service – repair, refurbishment, upgrades, diagnostics, lifecycle support, Automated sample management systems (life science)
- Materials
- Wafer (300mm), Wafer (200mm), Compound Semiconductor Substrate, Reticle (EUV), Wafer 300 mm, Wafer 200 mm
- Certificates
- ISO 9001:2015, ISO 13485:2016
- Founded
- 1978
- Employees
- 2000+
- Industries
- Semiconductor manufacturing, Advanced Packaging, Life Sciences / Lab Automation, Clinical Diagnostics, Industrial Automation
- 01
Application development / application consulting
- 02
Design and system architecture
- 03
Manufacturing and assembly
- 04
Testing and qualification
- 05
Commissioning at the customer
- 06
Service, maintenance and refurbishment
Materials & Processes
Wafer 300 mm
Substrate handling in vacuum and atmospheric systems for logic and memory manufacturing.
Wafer 200 mm
Processed in SMIF interface systems and load ports for 200-mm fabs.
Compound Semiconductor Substrate
Substrates for power and RF applications in semiconductor manufacturing.
Reticle (EUV)
Reticle handling for EUV lithography tools.
Products & Systems
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Vacuum Automation – precise substrate transport in vacuum environmentsEngineering | – | – | – | – | Wafers (300mm, 200mm, compound semiconductor, reticle) |
| Advanced Packaging AutomationEngineering | – | – | – | – | – |
| Contamination Control – measuring, analyzing, cleaning and protecting critical carriersSurface | – | – | – | – | – |
| Interface Automation – material flow and factory integration (load ports, SMIF, EUV reticleAssembly | – | – | – | – | Wafers, Reticles, Substrates, Carriers |
| Reticle Management & Lithography AutomationEngineering | – | – | – | – | Reticles |
| Lab Automation – laboratory workflows, sample handling, analytical processesEngineering | – | – | – | – | – |
| Pathway™ Service – repair, refurbishment, upgrades, diagnostics, lifecycle supportAssembly | – | – | – | – | – |
| Automated sample management systems (life science)Engineering | – | – | – | – | – |
11 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Vacuum robot | Brooks MagnaTran® | over 70,00 | – | – | – |
| High-temperature vacuum robot | Brooks MagnaTran® High-Temperature Robots | – | – | – | – |
| Vacuum robot platform | Brooks Leap™ Vacuum Robot Platforms | – | – | – | – |
| Modular vacuum systems | Brooks Marathon® Vacuum Systems | over 10,00 | – | – | – |
| EFEM platform (atmospheric) | Brooks Marathon® EFEM Platforms | – | – | – | – |
| Load port systems | Brooks Vision LEAP Load Ports | over 10,00 | – | – | – |
| SMIF interface | Brooks SMIF, Versaport | – | – | – | – |
| EUV reticle load port | Brooks EUV Reticle Loadport | – | – | – | – |
| Identification system | Brooks Auto ID | – | – | – | – |
| Collaborative robots | Brooks PreciseFlex | – | – | – | Livermore, CA, USA |
| Cryo pumps, cryo fillers and compressors | Brooks | – | – | – | – |
Additional services
Reference customers
Quality & Certificates
Brooks operates a quality management system in accordance with ISO 9001:2015 (Intertek, no. 0180265, valid until 09.07.2027). The lab automation division (Aim Lab Automation Technologies) is certified to ISO 13485:2016 (TÜV SÜD, no. QS2 092455 0004, valid until 07.06.2027).
| Evidence | Livermore, CA, USA |
|---|---|
| ISO 9001:2015 | |
| ISO 13485:2016 |
History
- 1978
Founded by Norman and Frank Brooks.
- 2002
Acquisition of Intelligent Automation Systems, Inc. (Cambridge, MA).
- 2011
Acquisition of the Celigo cell cytometer product line from Cyntellect; acquisition of Nexus Biosystems.
- 2012
Acquisition of intangible assets from Intevac; acquisition of Crossing Automation Inc.
- 2014
Sale of the Granville-Phillips business unit to MKS Instruments (completed 30.05.2014).
- 2017
Acquisition of 4titude (laboratory consumables).
- 2018
Acquisition of GENEWIZ (genomics service provider).
- 2022
David Jarzynka becomes CEO, David Pietrantoni becomes CFO (February 2022).
- 2024
Robin Vacha becomes SVP and GM Semiconductor Group; ISO 9001 initial certification Livermore (July 2024).
- 2025
Robert Caveney becomes Chief Technology Enablement Officer; 100% of electricity consumption covered by Energy Attribute Certificates.