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c-sense – Fertigung

Development of piezoresistive self-sensing cantilevers and readout electronics for laser-free AFM measurements

c-sense Logo

c-sense GmbH

Langenlois · Wiener Neustadt · ViennaNew on Amplifa

FN 539869 aCommercial register number (Regional Court Krems)
3 locationsLangenlois, Wiener Neustadt, Vienna
GmbHLegal form
approx. 25 yearsTechnology base of self-sensing cantilevers

About c-sense

c-sense GmbH is an Austrian nanotechnology company based in Langenlois (Lower Austria) that develops and markets active, self-measuring AFM cantilevers based on piezoresistive sensor technology. By directly integrating the measuring function into the cantilever, optical laser readout is eliminated, making measurements possible in environments where conventional optical beam deflection reaches its limits – for example in cryogenic systems, in vacuum, in SEM systems, in turbid or conductive liquids, and in compact custom research setups. The portfolio includes silicon self-sensing cantilevers with Si tip or tipless, patented trilayer cantilevers (polymer–semiconductor–ceramic thin-film architecture), conductive trilayer cantilevers for KPFM, EFM and cAFM, Quantum Cryogenic Trilayer (QCT) cantilevers, as well as the NanoOne and NanoLab Pro readout electronics. In addition, the company offers Custom Cantilever Development, OEM integration, Application Engineering, AFM Integration, as well as customer support and training. The technology builds on two decades of development as the successor to the SCL Sensor.Tech activities and serves industries such as biotechnology, semiconductor metrology, nanomechanics, quantum technologies and magnetic measurements.

Site
Langenlois
Processes
Development and distribution of piezoresistive, self-measuring AFM cantilevers (active, self-sensing, Silicon self-sensing cantilevers with integrated electrical readout (with Si tip or, Advanced Trilayer Self-Sensing Cantilevers (patented polymer thin-film trilayer architecture,, Conductive Trilayer Cantilevers for electrical and electrostatic AFM applications (KPFM, EFM,, Quantum Cryogenic Trilayer (QCT) cantilevers for low-temperature and cryogenic research, NanoOne Starter Kit – readout electronics, cables and self-sensing cantilevers as an entry-level, NanoLab Pro electronics (readout electronics), Custom Cantilever Development / made-to-spec custom solutions (custom cantilevers,
Materials
Silicon, Polymer (trilayer architecture), Semiconductor thin film (trilayer), Ceramic (trilayer, according to the publication 'polymer–semiconductor–ceramic cantilever'), Polymer–semiconductor–ceramic trilayer, Ceramic (trilayer)
Certificates
ISO 9001
Industries
Biotechnology, Semiconductor metrology, Nanomechanics, Quantum technologies, Magnetic measurements, Advanced OEM instrumentation
  1. 01

    Product definition

  2. 02

    Cantilever design and sensor development

  3. 03

    Custom Probe / Cantilever Development (with specialized manufacturing partners)

  4. 04

    Readout electronics (NanoOne, NanoLab Pro)

  5. 05

    System and AFM integration

  6. 06

    Application Engineering

  7. 07

    Customer support and training

Materials & Processes

Si

Silicon

Piezoresistive silicon cantilevers with integrated electrical readout, with Si tip or tipless, in various resonance frequencies and stiffnesses.

Polymer-Trilayer

Polymer–semiconductor–ceramic trilayer

Patented trilayer architecture for high force sensitivity and fast imaging, as published in Nature Electronics.

Trilayer-Dünnschicht

Semiconductor thin film (trilayer)

Thin-film component of the trilayer cantilevers for self-sensing piezoresistive readout.

Keramik

Ceramic (trilayer)

Hard layer and tip component of the trilayer cantilevers according to the publication 'polymer–semiconductor–ceramic cantilever'.

Locations

Standort Langenlois

Langenlois

AT

Headquarters

Materials
Silicon, trilayer (polymer, semiconductor thin film, ceramic)
  • Development and design of self-sensing cantilevers
  • Readout electronics
Standort Wiener Neustadt

Wiener Neustadt

AT

Laboratory (TFZ Technology and Research Center, Viktor Kaplan-Straße 2, Building E – 2nd floor)

  • AFM measurement technology
  • Application laboratory

Vienna

AT

Laboratory (Tech Park Vienna, Gutheil-Schoder-Gasse 17)

Products & Components

Trilayer Self-Sensing Cantilever
Trilayer Self-Sensing CantileverTrilayer architecture · Nanomechanics
Conductive Trilayer Cantilever (SEM image)
Conductive Trilayer Cantilever (SEM image)Conductive cantilevers · Semiconductor metrology
Quantum Cryogenic Trilayer (QCT) Cantilever
Quantum Cryogenic Trilayer (QCT) CantileverLow-temperature/cryogenic technology · Quantum technologies
NanoOne Starter Kit (preamplifier)
NanoOne Starter Kit (preamplifier)Readout electronics · OEM instrumentation

Inside the production

Trilayer self-sensing cantilever with thin film, polymer core, sensor and tip
Trilayer self-sensing cantilever with thin film, polymer core, sensor and tip
Quantum Cryogenic Trilayer Cantilever
Quantum Cryogenic Trilayer Cantilever
Self-sensing cantilever in turbid liquid with AFM images
Self-sensing cantilever in turbid liquid with AFM images
Nanomechanical microscope: AFM scanner, nanoindenter and optical microscope
Nanomechanical microscope: AFM scanner, nanoindenter and optical microscope
Comparison of optical readout vs. self-sensing readout
Comparison of optical readout vs. self-sensing readout
Topography and structure
Topography and structure
Mechanical properties
Mechanical properties
KPFM and EFM
KPFM and EFM
Conductive measurements
Conductive measurements
Low-temperature and quantum
Low-temperature and quantum
MFM – Magnetic force microscopy
MFM – Magnetic force microscopy
In-liquid and biosensing
In-liquid and biosensing

Industries

BiotechnologySemiconductor metrologyNanomechanicsQuantum technologiesMagnetic measurementsAdvanced OEM instrumentationResearch/Universities

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
Development and distribution of piezoresistive, self-measuring AFM cantilevers (active, self-sensingEngineering––––Silicon, Polymer thin-film trilayer
Silicon self-sensing cantilevers with integrated electrical readout (with Si tip orEngineering––––Silicon
Advanced Trilayer Self-Sensing Cantilevers (patented polymer thin-film trilayer architecture,Engineering––––Polymer, Thin-film semiconductor, Ceramic
Conductive Trilayer Cantilevers for electrical and electrostatic AFM applications (KPFM, EFM,Engineering––––Polymer, Thin-film semiconductor, Ceramic
Quantum Cryogenic Trilayer (QCT) cantilevers for low-temperature and cryogenic researchEngineering––––Polymer, Thin-film semiconductor, Ceramic
NanoOne Starter Kit – readout electronics, cables and self-sensing cantilevers as an entry-levelEngineering–––––
NanoLab Pro electronics (readout electronics)Engineering–––––
Custom Cantilever Development / made-to-spec custom solutions (custom cantilevers,Engineering––––Silicon, Polymer, Thin-film semiconductor, Ceramic
AFM measurement technology: topography and structure (surface height, 3D profile, phase imaging)Testing–––––
AFM measurement technology: mechanical properties (stiffness, adhesion, friction, viscoelasticity)Testing–––––
AFM measurement technology: KPFM and EFM (surface potential, work function, doping)Testing–––––
AFM measurement technology: conductive measurements (cAFM, nanoprobing, IV spectroscopy, SSRM)Testing–––––
AFM measurement technology: low-temperature and quantum measurements (Quantum Twisting Microscopy)Testing–––––
AFM measurement technology: MFM (magnetic force microscopy)Testing–––––
AFM measurement technology: in-liquid and biosensing (opaque and transparent liquid environments)Testing–––––
Nanomechanical microscope for correlated analysis / CAS-C NanoInspect for correlatedTesting–––––
System integration, OEM development, Application Engineering and electronics for high-performanceEngineering–––––

Additional services

OEM integrationApplication EngineeringCustom Probe DevelopmentCustom Cantilever DevelopmentElectronics for high-performance readout (NanoOne, NanoLab Pro)AFM integrationCustomer support and training

Reference customers

AlemnisDanube University (Donau-Universität Krems)EPFL

Quality & Standards

c-sense ensures quality through Application Engineering, custom sensor development and direct support by application scientists; the technology is backed by peer-reviewed publications (including Nature Electronics).

EvidenceLangenlois
ISO 9001

History

  1. Continuation of the SCL Sensor.Tech activities; the technology is based on two decades of self-sensing cantilever development

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