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Cleanpart – Fertigung

Surface technology, precision cleaning, thermal spray and DLC coatings as well as analytical services for industrial components.

Cleanpart Logo

Cleanpart (Mitsubishi Chemical Europe GmbH)

Düsseldorf (Mitsubishi Chemical Europe GmbH)New on Amplifa

GmbH, HRB 71391 (Düsseldorf Local Court)Legal form / Register
Mitsubishi Chemical Europe GmbHCompany
over 50 yearsIndustry experience
2016ASML certification

About Cleanpart

Cleanpart has been providing engineering services, coatings and surface care applications for industrial components for over 50 years. The portfolio covers chemical and surface technology, specialty coatings, mechanical and process engineering as well as precision services for sub-micron applications. The focus is on coating, cleaning, repairing, designing, redesigning and supplying reusable parts in particle-critical production environments. Processes include plasma, arc and flame spraying, PACVD DLC coatings (DYNAMANT™), electroplating, etching, anodizing, blasting as well as precision and lithography equipment parts cleaning with automated cleaning machines. Analytical services such as residual gas analysis (RGA), laboratory analyses (including ICP-MS, LPC) and leak testing complement the offering. Customers come from the semiconductor and electronics industry, medical technology, energy, oil & gas, aerospace and other sectors; in 2016 Cleanpart was certified by ASML. The DACH site is Mitsubishi Chemical Europe GmbH in Düsseldorf.

Site
Düsseldorf
Processes
Thermal Coating (Thermal Spray Coatings), Plasma Spray Coating, Electrical Arc Spray Coating, Flame Spray, DLC coatings (PACVD, DYNAMANT™), Plating, Anodizing, Precision cleaning
Materials
Aluminium, Tantal, Titanium, Magnesium, Niobium, Zirconia, Yttrium oxide, Aluminium oxide
Certificates
ASML certification (Cleanpart), ASML certification
Industries
Semiconductors & Electronics, Photovoltaics, Storage media, Display (LED/TFT), Medical technology, Energy
  1. 01

    Engineering / specification review

  2. 02

    Blasting / surface preparation

  3. 03

    Coating (thermal spray, PACVD-DLC, electroplating, etching, anodizing)

  4. 04

    Precision cleaning / lithography parts cleaning

  5. 05

    Inspection, laboratory analysis & RGA

  6. 06

    Refurbishment / logistics

Materials & Processes

Al

Aluminium

Wet-chemical etching for microstructuring of aluminium surfaces.

Ti

Titanium

Etching for roughening implant surfaces for improved osseointegration.

Ta

Tantal

Wet-chemical surface structuring.

Mg

Magnesium

Wet-chemical surface structuring.

Nb

Niobium

Wet-chemical surface structuring.

ZrO2

Zirconia

Plasma spray powder for thermal barrier and functional coatings.

Y2O3

Yttrium oxide

Ceramic spray material for plasma-sprayed coatings.

Al2O3

Aluminium oxide

Ceramic spray material for plasma spray coatings.

TiO2

Titanium oxide

Ceramic spray material for plasma spray coatings.

Cr2O3

Chromium oxide

Ceramic spray material for wear protection coatings.

HAp

Hydroxyapatite

Plasma spray coating for osteocompatible implant surfaces.

DLC

DLC (a-C:H, PACVD)

Amorphous hydrogenated carbon coatings (DYNAMANT™) with microhardness up to 2400 HV and friction coefficients from 0.03.

Locations

Standort Düsseldorf

Düsseldorf

DE

DACH site (Mitsubishi Chemical Europe GmbH, legal notice location)

Components & Equipment

Turbomolecular pump components
Turbomolecular pump componentsCleaning & coating · Semiconductor
Pump components
Pump componentsCleaning & refurbishment · Energy
Power plant components
Power plant componentsThermal spraying · Energy
Mechanical components
Mechanical componentsSurface technology · Industrial equipment

Inside the production

Specialty Coatings
Specialty Coatings
Surface Care
Surface Care
Analytical Services
Analytical Services
Component Refurbishment
Component Refurbishment
Surface technology and maintenance service for industrial components
Surface technology and maintenance service for industrial components

Industries

Semiconductors & ElectronicsPhotovoltaicsStorage mediaDisplay (LED/TFT)Medical technologyEnergyOil & GasAerospaceAutomotiveRailwayShippingGlassDefenseIndustrial equipmentFood

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
Thermal Coating (Thermal Spray Coatings)Surface–––––
Plasma Spray CoatingSurfaceRa 5 µm to 30 µm (adjustable)–––Polymers, Metals, Zirconia, Yttrium oxide, Aluminium oxide, Titanium oxide, Chromium oxide, Spinel, Hydroxyapatite (HAp)
Electrical Arc Spray CoatingSurface–––––
Flame SpraySurface–––––
DLC coatings (PACVD, DYNAMANT™)Surface–––––
PlatingSurface–––––
AnodizingSurface–––––
Precision cleaningSurface–––––
Blasting (abrasive blasting; corundum, glass beads, dry/wet)Surface–––––
Etching (wet chemical etching)Surface––––Aluminium, Tantal, Titanium, Magnesium, Niobium
Parts cleaning for lithography equipmentSurface–––––
Component refurbishmentAssembly–––––
Residual Gas Analysis (RGA)Testing–––––
Laboratory analyses (including ICP-MS, LPC)Testing–––––
Leak TestingTesting–––––
EngineeringEngineering–––––
Parts manufacturingMachining–––––
LogisticsEngineering–––––
ECD - Enhanced CVD DecontaminationSurface–––––

4 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Automated cleaning machines (lithography parts)–––––
Robot-controlled plasma spray guns–––––
PACVD reactor (DLC coating)–––––
Residual Gas Analyzer (mass spectrometer, mass range 1–200)–––––

Additional services

Precision cleaningLithography equipment parts cleaningBlasting technologyEtchingThermal spraying (plasma, arc and flame spraying)DLC coatings (PACVD, DYNAMANT™)Electroplating/platingAnodizingRefurbishmentLaboratory analysesResidual gas analysis (RGA)Leak testingInspection and controlParts manufacturingSales/distributionEngineeringLogisticsOnline Analytics Services

Reference customers

ASML (certification 2016)leading-edge customers (CVD, unnamed)

Quality

Component cleanliness is certified according to OEM specifications (e.g. ASML Grade 1); measuring equipment includes residual gas analysis (mass spectrometry 1–200 amu), ICP-MS, LPC particle monitoring and leak testing.

EvidenceDüsseldorf
ASML certification

History

  1. 2016

    Cleanpart certified by ASML

  2. 2018

    Change of ownership at Cleanpart Group (October 18, 2018)

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