
Surface technology, precision cleaning, thermal spray and DLC coatings as well as analytical services for industrial components.

Cleanpart (Mitsubishi Chemical Europe GmbH)
Düsseldorf (Mitsubishi Chemical Europe GmbH)New on Amplifa
About Cleanpart
Cleanpart has been providing engineering services, coatings and surface care applications for industrial components for over 50 years. The portfolio covers chemical and surface technology, specialty coatings, mechanical and process engineering as well as precision services for sub-micron applications. The focus is on coating, cleaning, repairing, designing, redesigning and supplying reusable parts in particle-critical production environments. Processes include plasma, arc and flame spraying, PACVD DLC coatings (DYNAMANT™), electroplating, etching, anodizing, blasting as well as precision and lithography equipment parts cleaning with automated cleaning machines. Analytical services such as residual gas analysis (RGA), laboratory analyses (including ICP-MS, LPC) and leak testing complement the offering. Customers come from the semiconductor and electronics industry, medical technology, energy, oil & gas, aerospace and other sectors; in 2016 Cleanpart was certified by ASML. The DACH site is Mitsubishi Chemical Europe GmbH in Düsseldorf.
- Site
- Düsseldorf
- Processes
- Thermal Coating (Thermal Spray Coatings), Plasma Spray Coating, Electrical Arc Spray Coating, Flame Spray, DLC coatings (PACVD, DYNAMANT™), Plating, Anodizing, Precision cleaning
- Materials
- Aluminium, Tantal, Titanium, Magnesium, Niobium, Zirconia, Yttrium oxide, Aluminium oxide
- Certificates
- ASML certification (Cleanpart), ASML certification
- Industries
- Semiconductors & Electronics, Photovoltaics, Storage media, Display (LED/TFT), Medical technology, Energy
- 01
Engineering / specification review
- 02
Blasting / surface preparation
- 03
Coating (thermal spray, PACVD-DLC, electroplating, etching, anodizing)
- 04
Precision cleaning / lithography parts cleaning
- 05
Inspection, laboratory analysis & RGA
- 06
Refurbishment / logistics
Materials & Processes
Aluminium
Wet-chemical etching for microstructuring of aluminium surfaces.
Titanium
Etching for roughening implant surfaces for improved osseointegration.
Tantal
Wet-chemical surface structuring.
Magnesium
Wet-chemical surface structuring.
Niobium
Wet-chemical surface structuring.
Zirconia
Plasma spray powder for thermal barrier and functional coatings.
Yttrium oxide
Ceramic spray material for plasma-sprayed coatings.
Aluminium oxide
Ceramic spray material for plasma spray coatings.
Titanium oxide
Ceramic spray material for plasma spray coatings.
Chromium oxide
Ceramic spray material for wear protection coatings.
Hydroxyapatite
Plasma spray coating for osteocompatible implant surfaces.
DLC (a-C:H, PACVD)
Amorphous hydrogenated carbon coatings (DYNAMANT™) with microhardness up to 2400 HV and friction coefficients from 0.03.
Locations

Düsseldorf
DEDACH site (Mitsubishi Chemical Europe GmbH, legal notice location)
Components & Equipment




Inside the production





Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Thermal Coating (Thermal Spray Coatings)Surface | – | – | – | – | – |
| Plasma Spray CoatingSurface | Ra 5 µm to 30 µm (adjustable) | – | – | – | Polymers, Metals, Zirconia, Yttrium oxide, Aluminium oxide, Titanium oxide, Chromium oxide, Spinel, Hydroxyapatite (HAp) |
| Electrical Arc Spray CoatingSurface | – | – | – | – | – |
| Flame SpraySurface | – | – | – | – | – |
| DLC coatings (PACVD, DYNAMANT™)Surface | – | – | – | – | – |
| PlatingSurface | – | – | – | – | – |
| AnodizingSurface | – | – | – | – | – |
| Precision cleaningSurface | – | – | – | – | – |
| Blasting (abrasive blasting; corundum, glass beads, dry/wet)Surface | – | – | – | – | – |
| Etching (wet chemical etching)Surface | – | – | – | – | Aluminium, Tantal, Titanium, Magnesium, Niobium |
| Parts cleaning for lithography equipmentSurface | – | – | – | – | – |
| Component refurbishmentAssembly | – | – | – | – | – |
| Residual Gas Analysis (RGA)Testing | – | – | – | – | – |
| Laboratory analyses (including ICP-MS, LPC)Testing | – | – | – | – | – |
| Leak TestingTesting | – | – | – | – | – |
| EngineeringEngineering | – | – | – | – | – |
| Parts manufacturingMachining | – | – | – | – | – |
| LogisticsEngineering | – | – | – | – | – |
| ECD - Enhanced CVD DecontaminationSurface | – | – | – | – | – |
4 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Automated cleaning machines (lithography parts) | – | – | – | – | – |
| Robot-controlled plasma spray guns | – | – | – | – | – |
| PACVD reactor (DLC coating) | – | – | – | – | – |
| Residual Gas Analyzer (mass spectrometer, mass range 1–200) | – | – | – | – | – |
Additional services
Reference customers
Quality
Component cleanliness is certified according to OEM specifications (e.g. ASML Grade 1); measuring equipment includes residual gas analysis (mass spectrometry 1–200 amu), ICP-MS, LPC particle monitoring and leak testing.
| Evidence | Düsseldorf |
|---|---|
| ASML certification |
History
- 2016
Cleanpart certified by ASML
- 2018
Change of ownership at Cleanpart Group (October 18, 2018)