Development and distribution of dry-bed chemisorption and plasma systems for exhaust air purification in the semiconductor and high-tech industry
CS CLEAN SOLUTIONS GmbH
Ismaning (85737) · Burkau (near Dresden)New on Amplifa
Exhaust air purification for semiconductor and other high-tech industry sectors
CS CLEAN SOLUTIONS GmbH has been active in exhaust air purification for the semiconductor, photovoltaic and related high-tech industries since 1986. The company develops the CLEANSORB technology based on dry-bed chemisorption in Ismaning near Munich, in which hazardous process exhaust gases are converted into inorganic salts without electricity, water or fossil fuels. The portfolio includes dry-bed absorber systems (CLEANSORB FABLINE, FABLINE FX, CLEANSORB TOWER) as well as atmospheric plasma sources (PCS TROPO, PCS STRATO) for the abatement of perfluorinated compounds such as CF4, CHF3, SF6 and NF3. All products, including the chemisorption granulates, are developed in-house from design to the tested end product; system housings and components are made of corrosion-resistant 316L stainless steel. Customers include all leading chip manufacturers as well as leading research institutes worldwide; further sales markets are pharmaceuticals and chemicals. Sales and service are provided via an international network of sales and service partners in Europe, North and South America, Asia and Australia, complemented by an own logistics site in Burkau near Dresden.
- Site
- Ismaning
- Processes
- Dry-bed chemisorption / exhaust air purification with CLEANSORB granulate (conversion of hazardous, Plasma Conversion (abatement of perfluorinated compounds such as CF4, CHF3, SF6, NF3 with, Conception, detailing and process engineering design of exhaust air purification systems and, Service & maintenance: column exchange, sensor calibration, refill of absorber columns,, Exhaust air purification/dry-bed chemisorption (CLEANSORB), Plasma Conversion Systems (PCS TROPO/STRATO) for PFC abatement, Refill service for absorber columns, Maintenance, commissioning, installation, process application support
- Materials
- 316L stainless steel (corrosion-resistant), 316L stainless steel, CLEANSORB chemisorption granulate, Plasma Conversion (PCS TROPO / PCS STRATO)
- Certificates
- AEO (Authorised Economic Operator), Accepted Known Consignor (Known Consignor), Accepted Known Consignor (Known Consignor, LBA)
- Founded
- 1986
- Industries
- Semiconductor, Photovoltaics, MEMS, Pharmaceuticals, Chemicals, Research institutes
- 01
R&D: system and plant design, process engineering design
- 02
Prototype construction, tests and qualification
- 03
Series introduction of the systems (CLEANSORB, PCS)
- 04
Logistics and shipping (Burkau), worldwide sales
- 05
Commissioning, installation and parameterization on site
- 06
Service: column exchange, refill, sensor calibration, maintenance, training
Materials & Processes
316L stainless steel
Corrosion-resistant stainless steel for housings and components of the dry-bed chemisorbers.
CLEANSORB chemisorption granulate
In-house developed dry-bed medium that converts hazardous exhaust gases into inorganic salts at room temperature.
Plasma Conversion (PCS TROPO / PCS STRATO)
Atmospheric plasma sources for the abatement of perfluorinated compounds such as CF4, CHF3, SF6 and NF3.
Locations
Ismaning
DEHeadquarters, development and R&D (system and plant design)
- Materials
- 316L stainless steel, CLEANSORB chemisorption granulate
- CLEANSORB FABLINE FX (dual-column chemisorber)
- CLEANSORB FABLINE
- PCS TROPO / PCS STRATO plasma sources
Burkau
DELogistics site (near Dresden): goods in/out, storage, picking, shipping
- ERP system
- Forklift
Systems & Assemblies
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Dry-bed chemisorption / exhaust air purification with CLEANSORB granulate (conversion of hazardousOther (exhaust/process gas purification) | – | – | – | – | 316L stainless steel (housings/components) |
| Plasma Conversion (abatement of perfluorinated compounds such as CF4, CHF3, SF6, NF3 withOther (exhaust/process gas purification) | – | – | – | – | – |
| Conception, detailing and process engineering design of exhaust air purification systems andEngineering | – | – | – | – | – |
| Service & maintenance: column exchange, sensor calibration, refill of absorber columns,Other (exhaust/process gas purification) | – | – | – | – | – |
5 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| CLEANSORB dry-bed chemisorber (dual-column exhaust gas purification system with backup column) | CS CLEAN SOLUTIONS CLEANSORB FABLINE FX | – | – | – | Ismaning (development), worldwide installations |
| CLEANSORB dry-bed absorber system (3 column sizes, standard model for hazardous gas removal) | CS CLEAN SOLUTIONS CLEANSORB FABLINE | – | – | – | Ismaning (development), worldwide installations |
| Atmospheric plasma source for PFC gas decomposition | CS CLEAN SOLUTIONS PCS TROPO / PCS STRATO | – | – | – | Ismaning (development) |
| Microwave plasma system | CS CLEAN SOLUTIONS PCS PIRANHA | – | – | 2008 (Mark | – |
| CLEANSORB TOWER (exhaust gas purification H2S/H2Se) | CS CLEAN SOLUTIONS CLEANSORB TOWER | – | – | 2010 (erst | – |
Additional services
Reference customers
Quality & Certification
The products are designed for safety and process reliability and are developed in-house from design to the tested end product. The company is certified as an AEO (Authorised Economic Operator) and as an Accepted Known Consignor by the Luftfahrt-Bundesamt (German Federal Aviation Authority).
| Evidence | Ismaning |
|---|---|
| AEO (Authorised Economic Operator) | |
| Accepted Known Consignor (Known Consignor, LBA) |