Fabmatics develops and manufactures automation, robotics and handling systems for material flow in semiconductor fabs.
Fabmatics GmbH
DresdenNew on Amplifa
About Fabmatics
Fabmatics is a system provider headquartered in Dresden, specializing in the automation of material flows and handling processes. The company implements Automated Material Handling Systems (AMHS) for semiconductor fabs, covering both 200-mm legacy fabs and 300-mm frontend automation, including reticle logistics and test wafer management. The portfolio comprises transport vehicles (AGV, RGV, PGV), transport systems, robotics and handling systems for cleanroom use, stocker systems as well as RFID integration and real-time locating systems. The range of services includes consulting, development, modeling of automation systems, production, installation, commissioning and after-sales service including a digital service portal for life-cycle management. Fabmatics has more than 35 years of experience in implementing customized automation projects worldwide and is part of the SCIO Automation Group. Customers come primarily from the semiconductor industry and high-tech manufacturing.
- Site
- Dresden
- Processes
- Automated Material Handling Systems (AMHS) for semiconductor fabs, 200mm Frontend Automation, 300mm Frontend Automation, Reticle Logistics Automation, Test Wafer Management, RFID Integration, Automation System Modeling, Third-Party Support
- Materials
- Automated Material Handling Systems, RFID Integration, Real-time Locating System (Fab-LIPS), Automated Guided Vehicle, Rail-Guided Vehicle (HERO Rail), OHT I/O-Stations (Loadports), Stocker Systems (FlatStocker, CubeStocker), Robot Cell (Luna)
- Industries
- Semiconductor industry, High-tech manufacturing
- 01
Consulting and Concept Development
- 02
Automation System Modeling
- 03
Development and Production
- 04
Installation and Commissioning
- 05
After-Sales Service and Life-Cycle Management
Technologies and Systems
Automated Material Handling Systems
Transport, handling, storage and identification systems for cleanroom use in semiconductor fabs.
RFID Integration
RFID readers, gateways and retrofit solutions as a foundation for scalable fab automation.
Real-time Locating System (Fab-LIPS)
Real-time locating for determining the position of systems in the fab.
Automated Guided Vehicle
Driverless transport system for automated material flow.
Rail-Guided Vehicle (HERO Rail)
Rail-guided vehicle for transport-safe, highly dynamic logistics tasks.
OHT I/O-Stations (Loadports)
Interface stations for the transfer of wafer containers in overhead transport.
Stocker Systems (FlatStocker, CubeStocker)
Cleanroom-capable overhead and floor storage systems for intermediate storage of carriers.
Robot Cell (Luna)
Robotics cell for the handling of carriers under cleanroom conditions.
Wafer Pod Purge System
System for purging wafer pods, contributing to wafer protection.
Location
Dresden
DEHeadquarters
- Materials
- AMHS, RFID, Robotics
- AGV
- HERO Rail RGV
- Mobile Robots
- Robot Cell Luna
- Test Wafer Center
- FlatStocker
- CubeStocker
- RFID Systems
- Fab-LIPS
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Automated Material Handling Systems (AMHS) for semiconductor fabsAssembly | – | – | – | – | – |
| 200mm Frontend AutomationAssembly | – | – | – | – | – |
| 300mm Frontend AutomationAssembly | – | – | – | – | – |
| Reticle Logistics AutomationAssembly | – | – | – | – | – |
| Test Wafer ManagementAssembly | – | – | – | – | – |
| RFID IntegrationAssembly | – | – | – | – | – |
| Automation System ModelingEngineering | – | – | – | – | – |
| Third-Party SupportEngineering | – | – | – | – | – |
| Wet Bench SolutionsAssembly | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Assembly | – | – | – | – | – |
18 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Automated Guided Vehicle (AGV) | Fabmatics | – | – | – | – |
| Rail-Guided Vehicle (RGV, HERO Rail) | Fabmatics HERO Rail | – | – | – | – |
| Person Guided Vehicle (PGV) | Fabmatics | – | – | – | – |
| Conveyor Systems / Box Opening Transfer | Fabmatics | – | – | – | – |
| OHT I/O-Stations (Loadports) | Fabmatics | – | – | – | – |
| Mobile Robots (Cleanroom-capable for Wafer, Reticle and Carrier Handling) | Fabmatics | – | – | – | – |
| Robot Cell (Luna, Carrier Handling) | Fabmatics Luna | – | – | – | – |
| Test Wafer Center (Kitting, Storage, De-Kitting) | Fabmatics | – | – | – | – |
| Carrier Gripper | Fabmatics | – | – | – | – |
| Wafer Gripper | Fabmatics | – | – | – | – |
| FOUP Opener | Fabmatics | – | – | – | – |
| Overhead Stocker (Zero Footprint, FlatStocker Cleanroom) | Fabmatics FlatStocker | – | – | – | – |
| Floor Stocker (CubeStocker Cleanroom) | Fabmatics CubeStocker | – | – | – | – |
| RFID Rack | Fabmatics | – | – | – | – |
| RFID Reader (LF/HF), RFID Gateway, RFID Reading Station | Fabmatics | – | – | – | – |
| Real-time Locating System (RTLS, Fab-LIPS) | Fabmatics Fab-LIPS | – | – | – | – |
| Wafer Pod Purge System | Fabmatics | – | – | – | – |
| Linear Stocker (Reticle Logistics, with SCIO) | SCIO Automation | – | – | – | – |
Additional services
History
More than 35 years of experience in implementing customized automation projects worldwide
Part of the SCIO Automation Group