Fabmatics automates material flows and handling processes in semiconductor fabs and high-tech cleanroom environments – from robots to the digital twin.
Fabmatics GmbH
Dresden · Utica, NY (USA)New on Amplifa
Automation from a single source – since 1991
Fabmatics GmbH, headquartered in Dresden, is a specialized provider for the automation of material flows and handling processes in semiconductor fabs and other high-tech production environments. Founded in 1991 and employing around 300 people, the company develops and manufactures mobile robots (HERO, SCOUT), rail-bound and automated guided transport systems, stationary robot cells, stocker storage systems, load ports, RFID systems as well as cleanroom components and precision parts up to cleanroom class ISO 1 and better. The portfolio covers hardware and software for handling, transport and storage, complemented by consulting, simulation, digital twin, system integration as well as maintenance and field service. A key focus is the modernization of 200-mm semiconductor fabs worldwide; the systems master the handling of wafers from 100 to 450 mm as well as EUV reticles. Since 2023, Fabmatics has been part of the SCIO Automation Group. Through its subsidiary Fabmatics USA Inc. in Utica, New York, the company operates worldwide, including for customers such as Infineon Technologies Dresden and BOSCH.
- Site
- Dresden
- Processes
- Mobile robots (HERO, SCOUT, HERO Rail) for wafer, reticle and carrier handling, Automated Material Handling Systems (AMHS) for 200mm and 300mm frontend fabs, Test Wafer Center (kitting, storage, de-kitting of test wafers), Purge systems for FOUP/SMIF wafer pods (inert gas purge), Smart Load Ports / Slim Load Ports (OHT I/O stations with RFID), RFID systems, RFID retrofit, Fab RTLS (indoor GPS FAB-LIPS), Conveyor transport systems for cleanroom production, Stocker storage systems (FlatStocker, CubeStocker, ZFS) for 200mm wafer cassettes
- Materials
- Wafers (100 to 450 mm), Reticles / EUV reticles (lithography masks), FOUP/SMIF wafer pods, Reticles / EUV Reticles, FOUP/SMIF Wafer Pods, Mobile Robots (HERO FAB Wi-Fi E84, HERO Scout, HERO Rail, HERO Fab), Rail-Guided Transport Systems (RGV) and Conveyors, Stocker Storage Systems (FlatStocker, CubeStocker, ZFS)
- Certificates
- ISO 9001, ISO 14001, IATF 16949, EN 9100
- Founded
- 1991
- Employees
- 300
- Industries
- Semiconductor manufacturing (200mm/300mm frontend), High-tech/cleanroom production environments, Equipment manufacturers (OEM), Photovoltaics (historical)
- 01
Fab assessment and feasibility studies
- 02
Process and requirements analysis
- 03
Development of individual automation solutions (hardware/software)
- 04
Automation System Modeling (simulation, digital twin)
- 05
Cleanroom manufacturing of robot systems, assemblies and components
- 06
Installation and commissioning
- 07
Maintenance, field service, retrofit and 24/7 spare parts warehouse
Products and Technologies
Wafers (100 to 450 mm)
Handling and transport of wafers in 200-mm and 300-mm frontend fabs.
Reticles / EUV Reticles
Special grippers and logistics solutions for lithography masks including EUV.
FOUP/SMIF Wafer Pods
Purge systems and handling solutions for wafer carriers and pods.
Mobile Robots (HERO FAB Wi-Fi E84, HERO Scout, HERO Rail, HERO Fab)
Cleanroom-compatible autonomous and rail-bound transport systems for wafers, reticles and carriers.
Rail-Guided Transport Systems (RGV) and Conveyors
Automated material transport for cleanroom production.
Stocker Storage Systems (FlatStocker, CubeStocker, ZFS)
Automatic intermediate storage for 200-mm wafer cassettes.
Stationary Robot Cell LUNA, Robot Cells, EFEMs
Handling of wafers and carriers at process and metrology equipment.
RFID Systems, CAN Gateway, Fab RTLS (FAB-LIPS)
Product identification, localization and SEMI-compliant connections in fabs.
Smart Load Port, Slim Load Port
OHT I/O stations with RFID identification and MES integration.
Test Wafer Center
Kitting, storage and de-kitting of test wafers with full traceability.
Locations
Dresden
DEEuropean headquarters: development, cleanroom manufacturing, software and service
- Materials
- Wafers (100–450 mm), Reticles/EUV Reticles, FOUP/SMIF Pods
- Mobile robots HERO FAB Wi-Fi E84, HERO Scout, HERO Rail, HERO Fab
- Stationary robot cell LUNA
- Stocker storage systems FlatStocker, CubeStocker, ZFS
- Test Wafer Center
- RFID Reader LF-134/HF-1356, CAN Gateway
- Indoor GPS FAB-LIPS
- Wafer Pod Purge System
- Smart/Slim Load Ports
- Fleet Manager HSFM
Utica, NY
USUS location (Fabmatics USA Inc.)
Products and Systems
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Mobile robots (HERO, SCOUT, HERO Rail) for wafer, reticle and carrier handlingAssembly | – | – | – | – | – |
| Automated Material Handling Systems (AMHS) for 200mm and 300mm frontend fabsAssembly | – | – | – | – | – |
| Test Wafer Center (kitting, storage, de-kitting of test wafers)Assembly | – | – | – | – | – |
| Purge systems for FOUP/SMIF wafer pods (inert gas purge)Surface | – | – | – | – | – |
| Smart Load Ports / Slim Load Ports (OHT I/O stations with RFID)Assembly | – | – | – | – | – |
| RFID systems, RFID retrofit, Fab RTLS (indoor GPS FAB-LIPS)Engineering | – | – | – | – | – |
| Conveyor transport systems for cleanroom productionAssembly | – | – | – | – | – |
| Stocker storage systems (FlatStocker, CubeStocker, ZFS) for 200mm wafer cassettesAssembly | – | – | – | – | – |
| Stationary robot cell LUNA, robot cells, EFEMs, carrier/wafer/reticle grippers (100 to 450 mm)Assembly | – | 450 mm (wafer gripper) | – | – | – |
| EUV reticle handling (reticle gripper)Assembly | – | – | – | – | – |
| AGV / RGV / PGV transport systems (HERO Fab, HERO Scout, HERO Rail, RFID trolley)Assembly | – | – | – | – | – |
| Fab assessment, feasibility studies, fab optimization, process and requirements analysisEngineering | – | – | – | – | – |
| Automation System Modeling: analytics, simulation, digital twinEngineering | – | – | – | – | – |
| Software: system integration, Fleet Manager (HSFM), GUI developmentEngineering | – | – | – | – | – |
| Third-party support: installation, commissioning, maintenance, field service, retrofit,Assembly | – | – | – | – | – |
| Cleanroom manufacturing of robot systems, assemblies, components and precision parts (cleanroom upAssembly | – | – | – | – | – |
| Box Opening Transfer Unit (conveyor)Assembly | – | – | – | – | – |
| FOUP opener (handling tool)Assembly | – | – | – | – | – |
14 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Mobile robot (AMR) | Fabmatics HERO FAB Wi-Fi E84 | – | – | – | Dresden |
| Autonomous mobile robot (AMR) | Fabmatics HERO Scout | – | – | – | Dresden |
| Rail-guided transport system (RGV) | Fabmatics HERO Rail | – | – | – | Dresden |
| Automated guided transport system (AGV) | Fabmatics HERO Fab | – | – | – | Dresden |
| Manual transport system (PGV) | Fabmatics RFID Trolley | – | – | – | Dresden |
| Stationary robot cell | Fabmatics LUNA | – | – | – | Dresden |
| Stocker storage system | Fabmatics FlatStocker | – | – | – | Dresden |
| Stocker storage system | Fabmatics CubeStocker | – | – | – | Dresden |
| Test Wafer Center | Fabmatics | – | – | – | Dresden |
| RFID Reader (LF/HF, series LF-134, HF-1356) | Fabmatics LF-134-SER-MINI, LF-134-ETH-MUX4, LF-134-SER, LF-134-CAN-ANT, LF-134-CAN, | – | – | – | Dresden |
| Indoor GPS / RTLS system | Fabmatics FAB-LIPS | – | – | – | Dresden |
| Purge system for wafer pods | Fabmatics Wafer Pod Purge System | – | – | – | Dresden |
| Load ports (OHT I/O stations) | Fabmatics Smart Load Port, Slim Load Port | – | – | – | Dresden |
| Fleet Manager | Fabmatics HSFM | – | – | – | Dresden |
Additional services
Reference customers
Quality
Fabmatics is certified to ISO 9001 and ISO 14001 and works with standardized management systems, defined processes and continuous improvement. Cleanroom competence up to class ISO 1 and better is demonstrated by in-house cleanroom manufacturing of robot systems, assemblies and precision parts.
| Evidence | Dresden |
|---|---|
| ISO 9001 | |
| ISO 14001 | |
| IATF 16949 | |
| EN 9100 |
History
- 1991
Founding of HAP GmbH Dresden (handling, automation and precision engineering) by Dr. Steffen Pollack, Manfred Jähnert and Lothar Andritzke
- 2007
Ortner enters the photovoltaics market; first 5-track wafer sorting system
- 2009
Ortner becomes a 100% member of the Roth & Rau Group (renamed Roth & Rau - Ortner GmbH in 2010)
- 2010
First mobile robot solution HAP-HERO for the semiconductor industry
- 2013
Zeiss Supplier Award SUCCESS for HAP; largest single order in factory automation (3.2 million €) awarded to Roth & Rau - Ortner by BOSCH
- 2014
Süd Beteiligungen and Wachstumsfonds Mittelstand Sachsen become shareholders (HAP Holding); Handling Award for the SCOUT robot
- 2015
HAP acquires Roth & Rau - Ortner GmbH and Ortner USA
- 2016
Merger of HAP and Ortner into Fabmatics GmbH and Fabmatics USA Inc. (1.9.2016); move to the new company headquarters; FlatStocker deployed for the first time
- 2018
Dr. Roland Giesen becomes Managing Director; founder Dr. Steffen Pollack moves to the advisory board
- 2019
2nd place at the Saxon Innovation Award for the further development of the SCOUT robot
- 2020
Dr. Andreas Purath becomes Managing Director (successor to Heinz Martin Esser); 10 years of the mobile robot HERO
- 2021
Management change at Fabmatics USA: Thomas Beeg succeeds Stan Rosenlof
- 2022
30 years of automation – company anniversary with 320 guests in Dresden
- 2023
Fabmatics becomes part of the SCIO Automation Group (approx. 1,800 employees in 8 countries)
- 2026
HERO Scout successfully tested with Infineon Technologies Dresden in real operation in a 200-mm fab as part of the EU project AIMS 5.0; introduction of the CAN Gateway