Vacuum coating systems, sputter targets and thin-film services for research and industry
FHR Anlagenbau GmbH
Ottendorf-Okrilla, DENew on Amplifa
Thin-film technology from the system to the target
FHR Anlagenbau GmbH specializes in thin-film technology and develops and manufactures vacuum coating systems as custom systems and series products – from laboratory clusters to large production systems in cluster, inline, roll-to-roll and boxx designs. The company supports customers throughout the entire life cycle: from engineering to commissioning, maintenance, spare parts, retrofits, training and technical audits. In addition, FHR offers coating materials, in particular sputter targets including consulting, manufacturing and recycling, as well as an in-house coating service for sampling, process qualification and small-series production. On 15.000 m² of production, coating and development floor space, more than 150 employees work for customers from research & development, the semiconductor/electronics industry, quantum technology and series-manufacturing industry, worldwide. Since December 2019, FHR has been part of the Vital Materials Company (Vital Group).
- Site
- Ottendorf-Okrilla
- Processes
- Vacuum coating / thin-film technology (sputtering, cluster, inline, roll-to-roll, boxx), Coating service (sampling, small series, qualification of the coating process), Target manufacturing and recycling, Systems engineering (custom systems & series products for thin-film technology), Coating Materials (Targets: Consulting, Manufacturing, Recycling), Coating Service (Sampling, Small Series), Customer Service (Maintenance, Spare Parts, Retrofits, Training, Technical Audits), Custom Systems & Series Products for Thin-Film Technology
- Materials
- Sputter Targets (Coating Materials), Vacuum Coating / Sputtering
- Certificates
- Certifications
- Employees
- 150+
- Industries
- Research & Development, Semiconductor/Electronics, Quantum Technology, Industry (Series Production)
- 01
Consulting & Engineering
- 02
Design & Systems Engineering
- 03
Target Manufacturing
- 04
Coating Service (Sampling, Small Series)
- 05
Commissioning
- 06
Customer Service (Maintenance, Spare Parts, Retrofits, Recycling)
Materials & Processes
Sputter Targets (Coating Materials)
Manufacturing and recycling of targets for sputtering processes in research and series production.
Vacuum Coating / Sputtering
Thin-film processes in cluster, inline, roll-to-roll and boxx systems, from sampling to large-series production.
Location
Ottendorf-Okrilla
DEProduction, Coating, Development
- Lot size
- Sampling, small series through large-scale series production
- Materials
- Sputter targets, thin films
- Vacuum Coating System - Cluster
- Vacuum Coating System - Inline
- Vacuum Coating System - Roll-to-Roll
- Vacuum Coating System - Boxx
Components & Products
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Vacuum coating / thin-film technology (sputtering, cluster, inline, roll-to-roll, boxx)Surface | – | – | – | Sampling / small series – large-scale series production | Targets (coating materials) |
| Coating service (sampling, small series, qualification of the coating process)Surface | – | – | – | small series | – |
| Target manufacturing and recyclingSurface | – | – | – | – | Sputter targets |
| Systems engineering (custom systems & series products for thin-film technology)Engineering | – | – | – | – | – |
4 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Vacuum Coating System - Cluster | FHR Anlagenbau GmbH | – | – | – | – |
| Vacuum Coating System - Inline | FHR Anlagenbau GmbH | – | – | – | – |
| Vacuum Coating System - Roll-to-Roll | FHR Anlagenbau GmbH | – | – | – | – |
| Vacuum Coating System - Boxx | FHR Anlagenbau GmbH | – | – | – | – |
Additional services
Quality
FHR supports coating processes from qualification in the sampling stage through to series production; the customer service team assists with maintenance, technical audits and training.
| Evidence | Ottendorf-Okrilla |
|---|---|
| Certifications |
History
- 2019
Acquisition of FHR Anlagenbau GmbH by the Vital Materials Company (Vital Group) in December 2019.