Development and manufacturing of measurement and automation systems for the semiconductor, quartz and photovoltaic industries
Freiberg Instruments GmbH
Freiberg · ShanghaiNew on Amplifa
About Freiberg Instruments
Freiberg Instruments GmbH, headquartered in Freiberg (Saxony), develops and manufactures precision metrology and automation solutions for the semiconductor, microelectronics, photovoltaic, chemical and medical technology industries. The product range includes X-ray diffractometers (XRD) for crystal orientation and quality control of silicon, SiC and quartz samples, contactless lifetime and resistivity measurement systems (MDP), surface photovoltage spectroscopy, luminescence readers (TL/OSL), battery formation systems, radiation monitoring systems as well as Raman sensors. The systems are customized and integrated into production lines; this includes robotic handling, software-controlled workflows, training, technical support and project-specific packaging including ISPM-15 wooden crates. The company originated as a university spin-off and has more than 20 years of experience with over 3,000 installed measurement systems worldwide. With more than 100 employees and 11 sales offices, Freiberg Instruments supplies industry and research cooperations such as Fraunhofer Institutes and TU Bergakademie Freiberg.
- Site
- Freiberg
- Processes
- X-ray diffractometry (XRD) for crystal orientation, sample alignment and quality control, Resistivity Mapping (RESmap, THzmap) for semiconductor quality control, PID testing (Potential Induced Degradation) for c-Si solar cells and mini-modules, Luminescence dating and dosimetry (TL/OSL systems), Battery cell formation and testing (Syntropic Cell Technology / FormationIQ), Radiation monitoring (Radiation Monitoring Systems), Raman sensing for polymer and semiconductor sorting, Magnetic suspension balance for high-precision sorption measurements
- Materials
- Silicon (mono- and multicrystalline), Silicon carbide, Gallium arsenide, Cadmium telluride, Indium phosphide, Zinc sulfide, Germanium, Gallium nitride
- Certificates
- ISO 9001:2015, EcoVadis Bronze, CE Compliance
- Employees
- +100 experts
- Industries
- Semiconductor, Microelectronics, Photovoltaics, Chemical Industry, Medical Technology, Battery Technology
- 01
Research & Development
- 02
System Design & Engineering
- 03
Manufacturing & Software Integration
- 04
Automated Sample Handling & Commissioning
- 05
Quality Control according to ISO 9001
- 06
Logistics & Packaging
- 07
Training & Technical Support
Materials & Measurement Technologies
X-ray Diffractometry
Crystal orientation, sample alignment and quality control on Si, SiC and quartz samples.
Microwave Detected Photoconductivity
Contactless, non-destructive lifetime and resistivity measurement according to SEMI PV9-1110.
Surface Photovoltage Spectroscopy
Contactless characterization of electro-optical material parameters.
Silicon
Mono- and multicrystalline ingots, bricks and wafers up to 450 mm diameter.
Silicon Carbide
Automated 200-mm ingot processing for OD/notch specifications.
Quartz
Bar alignment, wafer analysis and blank sorting with ≤10 arcsec standard deviation.
Luminescence Dosimetry
TL/OSL systems for geochronology, archaeology and radiation dosimetry.
Sites
Freiberg
DEHeadquarters, manufacturing and development
- Materials
- Si, SiC, GaAs, CdTe, InP, ZnS, Ge, GaN, quartz
- XRD series (Ingot XRD, Ingot XRD SiC, XRDmap Pro, Omega/Theta XRD, DDCOM, SDCOM, Wafer XRD)
- Quartz XRD series
- MDPpro / MDPpro 850+
- RESmap / THzmap
- HR-SPSmap, SPSresearch, SPSmap Heat
- PIDcon bifacial
- lexsyg TL/OSL readers
- FormationIQ
- MSBsorp
- RAMSES-4-CE
- Radiation monitoring systems (SmartKONT, GM 2100 and others)
Systems & Components
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| X-ray diffractometry (XRD) for crystal orientation, sample alignment and quality controlTesting | – | – | – | – | Si, SiC, Quartz |
| Testing | ≤ 10 arcsec standard deviation; alignment ±0.03° (AT & TF) | – | – | up to 700 blanks/h or 350 wafers/h | Quartz |
| Resistivity Mapping (RESmap, THzmap) for semiconductor quality controlTesting | – | – | – | – | Si, Semiconductor |
| Testing | – | 210 x 210 mm (brick) | – | >240 bricks/day or >720 wafers/day | Si, SiC, Gallium arsenide, CdTe, InP, ZnS, Perovskite, Oxides, Wide-bandgap materials, Epitaxial layers, Germanium, GaN |
| Testing | – | 850 mm or longer (brick) × 125x125 to 210x210 mm (ingot) | – | – | Si (monocrystalline), Perovskite |
| PID testing (Potential Induced Degradation) for c-Si solar cells and mini-modulesTesting | – | up to 210 x 210 mm | – | – | c-Si (solar cells) |
| Luminescence dating and dosimetry (TL/OSL systems)Testing | – | – | – | – | – |
| Battery cell formation and testing (Syntropic Cell Technology / FormationIQ)Testing | – | – | – | GWh-scale (FormationIQ modules) | – |
| Radiation monitoring (Radiation Monitoring Systems)Testing | – | – | – | – | – |
| Raman sensing for polymer and semiconductor sortingTesting | – | – | – | – | Plastic, Semiconductor |
| Magnetic suspension balance for high-precision sorption measurementsTesting | – | – | – | – | – |
| Testing | – | – | – | – | Semiconductor |
| Double Prism Monochromator (DPM100) for spectral analysisTesting | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Research & Development – new metrology development, prototyping & testingEngineering | – | – | – | – | – |
| Training and Application Expertise (on-site, remote, in Freiberg)Engineering | – | – | – | – | – |
| Technical Support (remote assistance, repairs, spare parts & upgrades)Engineering | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Ingot XRD – ingot processing for OD/notch specifications (SiC, 200 mm)Testing | – | 200 mm (SiC ingot) | – | – | SiC |
14 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| – | Freiberg Instruments | – | – | – | Freiberg |
| Quartz XRD diffractometer (bar/wafer/blank, X-ray tube 1.5 kW Cu anode) | Freiberg Instruments Quartz XRD series (Quartz Bar XRD, Quartz Wafer XRD, Quartz Blank XRD) | – | Wafers 20x20 to 80x80 mm; blanks 1x1 to 17x17 mm | – | Freiberg |
| Lifetime measurement system (μPCD/MDP) | Freiberg Instruments MDPpro | – | – | – | Freiberg |
| Lifetime & resistivity measurement system for monocrystalline Si ingots/bricks/wafers | Freiberg Instruments MDPpro 850+ | – | – | – | Freiberg |
| Resistivity mapping system | Freiberg Instruments RESmap / THzmap | – | – | – | Freiberg |
| Surface photovoltage spectroscopy systems | Freiberg Instruments HR-SPSmap, SPSresearch, SPSmap Heat | – | – | – | Freiberg |
| Double prism monochromator | Freiberg Instruments DPM100 | – | – | – | Freiberg |
| Benchtop PID tester | Freiberg Instruments PIDcon bifacial | – | Sample up to 210x210 mm; unit 350x330x280 mm, approx. 20 kg | – | Freiberg |
| TL/OSL luminescence readers | Freiberg Instruments | – | – | – | Freiberg |
| Battery formation & testing systems | Freiberg Instruments FormationIQ Module, FormationIQ Matrix, FormationIQ Board | – | – | – | Freiberg |
| Magnetic suspension balance | Freiberg Instruments MSBsorp | – | – | – | Freiberg |
| Raman sensor (fully automated, for polymer/semiconductor sorting) | Freiberg Instruments RAMSES-4-CE | – | – | – | Freiberg |
| Radiation monitoring systems | Freiberg Instruments SmartKONT, Comet2500, SmartRAY2, Beta-Aerosol monitor, GM 2100 | – | – | – | Freiberg |
| Angle Sorter | Freiberg Instruments Angle Sorter | – | – | – | Freiberg |
Additional services
Reference customers
Quality & Certification
The systems are manufactured according to ISO 9001:2015 and are CE compliant; quality assurance includes automated measurement data evaluation, repeatability > 99 % and traceable measurement results.
| Evidence | Freiberg |
|---|---|
| ISO 9001:2015 | |
| EcoVadis Bronze | |
| CE Compliance |
History
- 2005
Founded as a university spin-off; more than 20 years of experience in the development of metrology.
- 2024
More than 3,000 installed measurement systems worldwide, 11 sales offices, over 100 employees.
- 2030
Goal: net zero for operational emissions and EcoVadis Gold.
- 2040
Goal: net zero across the entire value chain.