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Manufacturer of plasma cleaning and surface treatment systems for vacuum and atmospheric pressure

GR

Grove Chemicals Co., Ltd.

China (two production sites, three development centers)New on Amplifa

2010Founded
800+Installed plasma systems
300+Customers from over 25 industries
2–5,000 lVacuum chamber volume
over 70%Share of custom systems

About Grove Chemicals

Since 2010, Grove Chemicals has been developing, manufacturing and marketing plasma systems for surface treatment. The portfolio includes vacuum plasma cleaning systems, atmospheric pressure plasma systems (nozzle and direct jet technology), RTR and DBD systems for web materials, special systems for medical catheters, wafer cleaning systems with dual chambers as well as PTFE surface modification and plasma etching systems. The range is complemented by laser cleaning, dry dust removal (USC), contact angle measuring devices, AOI inspection systems and UV-LED products. The systems are used in electronics and semiconductor manufacturing, automotive, medical technology, packaging and printing, as well as for filter glass, camera modules, acoustic components and battery cells. More than 800 installed systems, over 300 customers from more than 25 industries and a share of custom systems of over 70% document the focus on customized solutions; vacuum chambers are manufactured from 2 to 5,000 liters. The company operates two production sites and three development centers and delivers worldwide.

Site
China (two production sites
Processes
Vacuum plasma cleaning (low-pressure plasma surface treatment), Atmospheric pressure plasma cleaning (atmospheric jet/direct spray plasma surface treatment), Plasma surface activation, Plasma etching (plasma dry etching), PTFE plasma surface modification, Roll-to-roll plasma cleaning (RTR), Dielectric barrier plasma cleaning (DBD, inline), Plasma polishing and deburring
Materials
PTFE, Polypropylene PP, Polyethylene PE, Polyester PET, ABS, Nylon + glass fiber, Semiconductor silicon (wafers), Ceramic substrates
Founded
2010
Industries
Electronics, Semiconductors, Automotive, Medical technology, Packaging and printing, Battery technology
  1. 01

    Technical consulting

  2. 02

    Free sample testing (48 h)

  3. 03

    Solution development

  4. 04

    Manufacturing

  5. 05

    Factory acceptance test

  6. 06

    Installation and commissioning

  7. 07

    Training and parameter optimization

  8. 08

    Maintenance and service

Materials & Processes

VAK

Vacuum Plasma Treatment

Low-pressure plasma cleaning and activation of plastics, semiconductor silicon, ceramics, metals, PCBs and FPCs.

ATM

Atmospheric Pressure Plasma

Jet and direct nozzle processes for activating PP, PE, PET, ABS, PTFE and glass-fiber reinforced nylon.

RTR

RTR Plasma (Roll-to-Roll)

Web-based plasma treatment of films, aluminum foil and separator films up to 500 mm width.

DBD

DBD Plasma

Inline dielectric barrier discharge treatment for films and flat materials.

PTFE

PTFE Modification

Plasma treatment to improve the surface adhesion of PTFE.

ÄTZ

Plasma Etching

Dry etching of semiconductor silicon, wafers and photoresist.

LSR

Laser Cleaning

Contactless surface preparation and cleaning.

USC

Dry Ultrasonic Dust Removal

Contactless dust removal including cyclone electrostatic systems.

OPT

Metrology

Contact angle measurement and AOI visual inspection to verify treatment quality.

Locations

China

CN

Production and Development

Materials
Plastics, PTFE, silicon, ceramics, metals
  • Vacuum plasma systems
  • Atmospheric pressure plasma systems
  • RTR systems
  • DBD systems
  • Plasma etching systems
  • Contact angle measuring devices
  • AOI systems

Industries

ElectronicsSemiconductorsAutomotiveMedical technologyPackaging and printingBattery technologyElectronics industrySemiconductor industryAutomotive manufacturingMedical devicesPackaging and printingOptical filtersCamera modulesAcoustic componentsSemiconductor packagingBiomedical devicesAutomotive interiorsPackaging containersNew energy batteries

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
Vacuum plasma cleaning (low-pressure plasma surface treatment)Surface––––Plastics, PTFE, Semiconductor silicon, Ceramics, Metals, PCB, FPC
Atmospheric pressure plasma cleaning (atmospheric jet/direct spray plasma surface treatment)Surface––––Plastics (PP, PE, PET), PTFE, Nylon + glass fiber, ABS
Plasma surface activationSurface––––Plastics, PTFE, Glass, Ceramics
Plasma etching (plasma dry etching)Surface––––Semiconductor silicon, Wafers, Photoresist
PTFE plasma surface modificationSurface––––PTFE
Roll-to-roll plasma cleaning (RTR)Surface–500 mm––Films, Aluminum foil, Separator films, FPC flexible web material
Dielectric barrier plasma cleaning (DBD, inline)Surface––––Films, Sheet and flat materials
Plasma polishing and deburringSurface––––Metals
Laser cleaningSurface–––––
UV LED surface treatmentSurface–––––
Dry ultrasonic dust removal (USC)Surface–––––
Water droplet contact angle measurementTesting–––––
AOI visual inspectionTesting–––––

21 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Benchtop plasma cleanerAP-PR/M-3L––––
Industrial vacuum plasma cleanerPLS-200L––––
Compact laboratory plasma cleanerPR5L––––
Vacuum plasma cleanerPM-20LN––––
Medical catheter plasma cleanerPLAUX-PT1800––––
Compact plasma cleaner for gloveboxesPM-3LN––––
Vacuum plasma cleaning equipmentPM/R-80LN––––
Inline dielectric barrier plasma cleanerPLAUX-AP-PM1000––––
Wide-width plasma cleanerPG-110LN––––
Atmospheric direct-spray plasma treatment machinePlaux-AP-PE1000––––
Atmospheric direct-spray plasma surface treatment machineAP-PM1000––––
Atmospheric jet plasma cleanerPTS-2D––––
Roll-to-roll plasma cleanerRTR100L-W500––––
Nitrogen wide-width plasma treatment equipmentPG-110LNLN––––
Dual-chamber wafer plasma cleaning equipmentPLAUX-JY-60LS––––
Cyclone electrostatic dust removal unitPLAUX-X120RT––––
Automotive interior parts plasma cleanerPM-2300LN––––
Low-temperature vacuum plasma cleaner (customizable)RYC-1000––––
Plasma dry etching machineJY-36LN––––
PTFE plasma surface cleaning machineVPC-500F––––
Plasma polishing and deburring equipmentNC-450––––

Additional services

Free sample testing (within 48 hours)Free on-site installation and commissioningOn-site training and parameter optimizationMaintenance plans and regular follow-up visits1-year warranty and long-term maintenanceEquipment rental (plasma cleaner rental)Custom non-standard plasma cleaning equipmentDemo machines availableLaboratory testing (contact angle, pull-force measurement, etc.)

Reference customers

住友电工(SUMITOMO)苏州晶方半导体科技股份有限公司浙江水晶光电科技有限公司舜宇光学(SUNNY)纬创集团(Wistron)泰科电子(TE)嘉联益电子(Career)楼氏集团(KNOWLES)泰德兴精密电子(Memtech)华为(HUAWEI)德昌电机(深圳)有限公司(JOHNSON ELECTRIC)OSRAM(欧司朗)欧菲光科技股份有限公司Amphenol(安费诺集团)TPK(厦门宸鸿科技有限公司)格科微电子(上海)有限公司江苏捷捷微电子股份有限公司哈姆林电子苏州有限公司米巴精密零部件(中国)有限公司

History

  1. 2010

    Company founded with a focus on the development, manufacture and distribution of plasma cleaning technology.

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