Development of inductive plasma sources (Helicon/Resonant-ICP) based on a proprietary resonance network concept
Helyssen
SwitzerlandNew on Amplifa
About Helyssen
Helyssen develops and manufactures inductive plasma sources based on a proprietary resonance network concept. The technology achieves high plasma densities without high drive power and is scalable to areas of up to several square metres. The company's Helicon plasma sources are used in research, among other applications, at the Swiss Plasma Center (SPC) of EPFL in the form of the RAID and Torpex devices. Further fields of application include the semiconductor industry – here Helyssen jointly developed a Resonant-ICP plasma source for diamond nucleation with Evatec AG – as well as satellite thrusters based on its own plasma source. The company has been named one of the leading semiconductor startups in Switzerland and publishes on topics relating to plasma technology, ITER and industrial applications. Helyssen communicates in English and collaborates with research institutions and industrial partners.
- Site
- Switzerland
- Processes
- Inductive plasma sources (Helicon plasma, Resonant ICP), Resonant ICP Plasma source for Diamond Nucleation, Satellite thruster based on the Helyssen plasma source, Development and production of inductive plasma sources (Helicon/Resonant-ICP) based on
- Materials
- Diamond, Helicon plasma source, Resonant ICP plasma source, Satellite thruster
- Industries
- Semiconductors, Aerospace, Research (plasma physics/ITER), Food, Coating/Diamond nucleation, Aerospace (satellite thrusters)
- 01
Development of the resonance network concept
- 02
Design and construction of inductive plasma sources
- 03
Commissioning at research and industry partners
- 04
Further development for applications such as diamond nucleation and satellite
Processes and Technologies
Helicon plasma source
Inductive plasma source based on resonance networks, in use at SPC/EPFL (RAID, Torpex).
Resonant ICP plasma source
Plasma source developed jointly with Evatec AG for diamond nucleation.
Satellite thruster
Thruster concept for satellites based on the Helyssen plasma source.
Locations
Switzerland
CHCompany headquarters
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Inductive plasma sources (Helicon plasma, Resonant ICP)Surface | – | – | – | – | – |
| Resonant ICP Plasma source for Diamond NucleationSurface | – | – | – | – | Diamond |
| Satellite thruster based on the Helyssen plasma sourceOther | – | – | – | – | – |
3 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Helicon plasma source (RAID device) | Helyssen RAID | – | scalable up to several square metres (technology) | – | SPC/EPFL |
| Helicon plasma source (Torpex device) | Helyssen Torpex | – | – | – | SPC/EPFL |
| Resonant ICP plasma source (for diamond nucleation) | Helyssen | – | – | – | – |
Additional services
Reference customers
History
- 2012–2016
Publications and contributions on plasma technology, EPFL, ITER, Tokamak and industrial applications according to the website's blog archive