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HPPI – Fertigung

Development and distribution of TLP, VF-TLP, HBM, HMM and CC-TLP test systems for the semiconductor industry

HPPI Logo

High Power Pulse Instruments GmbH

Haar (Stadlerstrasse 6A, 85540)New on Amplifa

2012 (first documented publication)Documented activity since
GmbHLegal form
320 mm × 320 mmProbing area ATS-8300G
up to 160 A / 43 kV HMMMaximum pulse power

About High Power Pulse Instruments

High Power Pulse Instruments (HPPI) GmbH, based in Haar near Munich, develops and distributes measurement and test systems for the electrostatic characterization of semiconductor devices. The product portfolio includes Transmission-Line-Pulse (TLP) systems up to 160 A and 43 kV HMM, VF-TLP systems, HBM test systems according to ANSI/ESDA/JEDEC JS-001, CC-TLP solutions for CDM investigation based on a method from Fraunhofer EMFT, as well as the fully automatic ATS-8300G probing system for package and wafer level. The offering is complemented by probes, probe arm kits, bias tees, load resistors, pulse modules, current sensors, calibration substrates, software and ESD consulting. The systems are used, among other things, for recording high-current I-V characteristics, turn-on/off transients, breakdown investigations and SOA characterization of RF LDMOS, DMOS, CMOS and BJT devices. Customers come from semiconductor device development, ESD protection as well as RF and microwave applications.

Site
Haar
Processes
TLP (Transmission Line Pulse) characterization, VF-TLP characterization, HBM testing (ANSI/ESDA/JEDEC JS-001), HMM testing (Human Metal Model, up to 15 kV / 43 kV), CC-TLP (CDM investigation according to Fraunhofer EMFT), Wafer-level calibration (TLP/VF-TLP/HMM/HBM), On-wafer measurements with high-performance TLP probes, Temperature measurements (thermal chuck, up to 300 mm probe stations)
Materials
Transmission Line Pulse (TLP), Very Fast TLP, Human Body Model (ANSI/ESDA/JEDEC JS-001), Human Metal Model (IEC 61000-4-2 Systemlevel), Contactless CDM (Fraunhofer EMFT)
Certificates
ANSI/ESDA/JEDEC JS-001 (HBM)
Industries
Semiconductor industry, Semiconductor device development, ESD protection, RF & Microwave, ESD protection solutions, RF & Microwave (ARMMS)
  1. 01

    Development of the test systems

  2. 02

    Manufacturing of the hardware (pulse generators, probing systems, accessories)

  3. 03

    Software development

  4. 04

    Calibration (wafer level)

  5. 05

    Distribution and support

  6. 06

    ESD consulting

Products and Measurement Methods

TLP

Transmission Line Pulse (TLP)

High-current I-V characterization under pulsed operation with pulse widths from 1 ns to 1.6 µs.

VF-TLP

Very Fast TLP

Investigation of fast ESD events with rise times from 30 ps.

HBM

Human Body Model (ANSI/ESDA/JEDEC JS-001)

Standard-compliant ESD testing from 30 V to 10 kV, individually or as a 30-pin matrix.

HMM

Human Metal Model (IEC 61000-4-2 Systemlevel)

System-level ESD tests up to 43 kV.

CC-TLP

Contactless CDM (Fraunhofer EMFT)

Contactless investigation of Charged-Device-Model events with DC test option.

Locations

Haar

DE

Headquarters, development and distribution

  • ATS-8300G (320 mm × 320 mm)
  • HBM-TS10-A
  • TLP-8010C Advanced
  • TLP-3010C
  • TLP-16010C
  • PS-5026B
  • CCTLP-DC
  • 30-Pin HBM Matrix Tester

Test Systems and Accessories

ATS-8300G Automated Test System
ATS-8300G Automated Test SystemFully automatic probing · Semiconductor/ESD testing
HBM-TS10-A
HBM-TS10-A10 kV HBM test system · ESD protection
TLP-8010C Advanced
TLP-8010C Advanced80 A VF-TLP/TLP, 15 kV HMM · Semiconductor characterization
TLP-3010C
TLP-3010C30 A TLP/VF-TLP/HMM test system · Semiconductor characterization
TLP-16010C
TLP-16010C160 A high-voltage pulse generator, up to 43 kV HMM · Semiconductor characterization
CC-TLP-50-A1
CC-TLP-50-A1CC-TLP probe · CDM investigation
HP-T26A TLP Probes
HP-T26A TLP ProbesOn-wafer measurement · VF-TLP/TLP
30-Pin HBM Matrix Tester
30-Pin HBM Matrix TesterANSI/ESDA/JEDEC JS-001 · ESD testing

Inside the production

ATS-8300G Automated Test System
ATS-8300G Automated Test System
PS-5026B Portable Wafer Probe Station
PS-5026B Portable Wafer Probe Station
CCTLP-DC Probing System
CCTLP-DC Probing System
Accurate Calibration – Wafer-Level Calibration Substrate
Accurate Calibration – Wafer-Level Calibration Substrate
Bias Tee BT-101000B (1 kV, 10 A, 4 GHz)
Bias Tee BT-101000B (1 kV, 10 A, 4 GHz)
15 kV 50 Ω Coaxial Load Resistor
15 kV 50 Ω Coaxial Load Resistor
30 ps Integrated Pulse Module
30 ps Integrated Pulse Module
Flexible Pitch GND Fixture GF-A
Flexible Pitch GND Fixture GF-A

Industries

Semiconductor industrySemiconductor device developmentESD protectionRF & MicrowaveESD protection solutionsRF & Microwave (ARMMS)

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
TLP (Transmission Line Pulse) characterizationTesting–320 mm × 320 mm–––
VF-TLP characterizationTesting–––––
HBM testing (ANSI/ESDA/JEDEC JS-001)Testing–––––
HMM testing (Human Metal Model, up to 15 kV / 43 kV)Testing–––––
CC-TLP (CDM investigation according to Fraunhofer EMFT)Testing–––––
Wafer-level calibration (TLP/VF-TLP/HMM/HBM)Testing–24 mm × 24 mm–––
On-wafer measurements with high-performance TLP probesTesting–––––
Temperature measurements (thermal chuck, up to 300 mm probe stations)Testing–300 mm–––
DC-tested CC-TLP probing measurementsTesting–––––
Characterization of semiconductor devices under pulsed operation (I-V characteristics, SOA,Testing–––––

21 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Automated test/probing system (TLP, VF-TLP, HBM, HMM, CC-TLP)HPPI ATS-8300G1320 mm x 320 mm––
HBM test system (10 kV, ANSI/ESDA/JEDEC)HPPI HBM-TS10-A1–––
VF-TLP/TLP system (80 A) with 15 kV HMM, optional 6 kV HBMHPPI TLP-8010C Advanced1–––
TLP/VF-TLP/HMM test system (30 A)HPPI TLP-3010C1–––
High voltage 50 Ω pulse generator (160 A, up to 43 kV HMM)HPPI TLP-16010C1–––
Portable wafer probe station for TLP/VF-TLP/HMM/HBMHPPI PS-5026B1–––
30-pin HBM matrix tester (30 V to 10 kV)HPPI1–––
Solid-state 2-pin HBM pulser (±30 V to ±10 kV)HPPI1–––
CC-TLP probing system with DC testHPPI CCTLP-DC1–––
CC-TLP probeHPPI CC-TLP-50-A11–––
TLP probes (high-performance VF-TLP/TLP on-wafer)HPPI HP-T26A1–––
Probe arm kit (TLP/VF-TLP/HMM picoprobe)HPPI PHD-4001A1–––
Pulse force/sense probe (GGB picoprobe model 10) with touchdown force sensorsHPPI PHD-3001A-FS1–––
Pulse current sensor (160 A in 150 ps, 3 GHz bandwidth)HPPI CS-0V5-A1–––
Calibration substrate (wafer level)HPPI CAL-04A124 mm x 24 mm, pitch 50 µm to 3 mm––
Wafer-level calibration substrateHPPI1–––
Flexible pitch GND fixture (GND clamps)HPPI GF-A1–––
Bias tee (1 kV, 10 A, 4 GHz) for DC-biased TLP/VF-TLP/HMM/RF measurementsHPPI BT-101000B1–––
15 kV 50 Ω coaxial load resistor (100 W, DC to 3.5 GHz)HPPI1–––
30 ps rise-time pulse module with pick-off and DUT switchHPPI1–––
Pulse width extenderHPPI TLP-3011C / TLP-8012A5––––

Additional services

Development and distribution of TLP/VF-TLP/HBM/HMM/CC-TLP test systems and measurement technologyWafer-level and package-level probing (automated, ATS-8300G)Wafer-level calibration (calibration substrates CAL-04A, Accurate Calibration)Software for test systemsESD know-how/consultingAccessories for VF-TLP/TLP/HMM/HBM (probes, probe arm kits, bias tees, load resistors, pulseCDM investigation via CC-TLP (based on Fraunhofer EMFT)

Reference customers

Fraunhofer EMFT (source of the CC-TLP method; not explicitly named as a customer)GGB Picoprobe (component supplier, not documented as a customer)

Quality and Standards

The systems comply with recognized standards such as ANSI/ESDA/JEDEC JS-001 (HBM) and IEC 61000-4-2 (system-level ESD); wafer-level calibration substrates such as CAL-04A support measurement accuracy. No documented ISO certificates are available.

EvidenceHaar
ANSI/ESDA/JEDEC JS-001 (HBM)

History

  1. 2012

    Publication 'High Current TLP Characterisation' at the ARMMS conference (November 19–20, 2012, Wyboston Lakes, UK)

  2. 2013

    First products (TLP-3010C, PS-5026B, accessories) published on the website

  3. 2014

    Release of the software and calibration products 'Accurate Sub-ns Timing' and 'Accurate Calibration'

  4. 2026

    Launch of ATS-8300G, CC-TLP-50-A1, TLP-16010C, CCTLP-DC and further new products

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