Develops plasma sensor technology, metrology and software for monitoring and controlling industrial plasma processes.
House of Plasma GmbH
Bochum · Universitätsstraße 136, 44799 BochumNew on Amplifa
About House of Plasma
House of Plasma is a spin-off of the Institute of Applied Electrodynamics and Plasma Technology (AEPT) at Ruhr University Bochum and develops sensor and diagnostic systems for industrial low-pressure plasma processes. The core product is the Multipole Resonance Probe (MRP), which allows product-critical plasma parameters — e.g. in the coating of ophthalmic lenses or in semiconductor manufacturing — to be captured directly and in real time during the process; a Langmuir probe is also offered. The team of engineers and scientists supports customers along the entire value chain: from consulting and process development through the development of plasma sources and electronics to measurement campaigns as a service, rental of metrology equipment, controller design, retrofitting, maintenance, and software for data processing and process optimization in the sense of Industry 4.0. Fields of application include semiconductor manufacturing, thin-film technology, glass coating, photonics as well as plasma etching and plasma deposition. The company is based in Bochum and works on national and EU-wide research and industrial cooperations.
- Site
- Bochum
- Processes
- Consulting & Process Development, Development of Plasma Sources & Electronics, Metrology & Sensor Technology (MRP, Langmuir Probe), Measurement-as-a-Service / Measurement Campaigns, Rental of Metrology Equipment, Workshops & Trainings, Integration & Automation (Industry 4.0), Retrofitting
- Materials
- Multipole Resonance Probe, Langmuir Probe, Plasma Sources & Electronics, Software & Data Analysis
- Founded
- 2022
- Employees
- 2–10
- Industries
- Semiconductor manufacturing, Thin-film technology, Glass coating, Photonics, Ophthalmic lenses (eyeglass lenses), Plasma etching
- 01
Consulting & Process Development
- 02
Development of Plasma Sources & Electronics
- 03
Sensor Technology & Metrology (MRP, Langmuir Probe)
- 04
Software for Data Processing & Process Optimization
- 05
Integration & Automation / Retrofitting
- 06
Maintenance & Measurement Campaigns as a Service
Technologies & Processes
Multipole Resonance Probe
Captures internal, direct plasma parameters in real time for monitoring and controlling plasma-assisted low-pressure processes.
Langmuir Probe
Classical plasma diagnostics for purchase or for on-site measurement campaigns.
Plasma Sources & Electronics
Development of customized hardware, including electronics for high-frequency technology and trigger signals.
Software & Data Analysis
Data processing, process monitoring and controller design for self-optimizing plasma processes.
Locations
Bochum
DEHeadquarters with development and consulting
- Materials
- MRP, Langmuir probe, electronics, software
Industries
Additional services
History
- 2022
Founded as a spin-off of the Institute of Applied Electrodynamics and Plasma Technology (AEPT) at Ruhr University Bochum
- 2021
1st place & special award “Best University Spin-off” Senkrechtstarter (Bochum economic development agency); Top50 Startups ranking
- 2022
1st place RWTÜV Startup Prize (€70,000 prize money); winner of the Founding Competition Digital Innovations (BMWK); alumnus of the High-Tech.NRW Accelerator
- 2025/2026
Start of the funded project DIGI4PLAS (with PLASUS GmbH, deeplify GmbH, Fraunhofer IST; funded via Industrie.IN.NRW / EFRE-JTF)