Ion implantation and irradiation of power semiconductors, materials analysis and innovative sensors from research
HZDR Innovation GmbH
Radeberg (HZDR Innovation Campus)New on Amplifa
About HZDR Innovation GmbH
HZDR Innovation GmbH is a technology transfer company in a high-tech environment, located at the HZDR Innovation Campus in Radeberg. Its core business area is ion implantation: in the ion beam center of the Helmholtz-Zentrum Dresden-Rossendorf, the company performs standard and high-energy ion implantation as well as ion irradiation of power semiconductors, complemented by electron irradiation. A broad ion energy range, a large selection of available ion species and the ability to implement complex special orders form the basis of its services for customers worldwide. In addition, HZDR Innovation offers materials analysis, multiphase measurements and transfer services. The product portfolio includes flexible temperature sensors, magnetic field sensors, radiation detectors, metrology, magnetic field coils and laboratory automation software. The developments originate from research teams at the HZDR and other scientific institutions and are advanced to market maturity; the GmbH also supports spin-off projects and startups.
- Site
- Radeberg
- Processes
- High-energy ion implantation, Standard ion implantation, Ion irradiation of power semiconductors, Electron irradiation, Materials analysis, Multiphase measurements, Transfer services / technology transfer, Ion implantation (standard and high-energy ion implantation)
- Materials
- Power semiconductors, Silicon wafers, Ion implantation, Electron irradiation
- Certificates
- ISO 9001
- Industries
- Power electronics / power semiconductors, Semiconductor industry, High technology, Sensor technology, Metrology, Startups / spin-offs
- 01
Inquiry and consulting
- 02
Substrate preparation
- 03
Ion implantation or irradiation
- 04
Materials analysis / testing
- 05
Information and transfer services
Materials and Processes
Silicon wafers
Substrate material for standard and high-energy ion implantation.
Power semiconductors
Material for ion irradiation for the refinement of power electronics.
Ion implantation
Standard and high-energy implantation with a broad energy range and diverse ion species.
Electron irradiation
Irradiation service complementing ion technology.
Locations
Radeberg
DESite / HZDR Innovation Campus
- Materials
- Power semiconductors, silicon wafers
- Facilities of the ion beam center of the HZDR (Dresden-Rossendorf)
Products and Components
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| High-energy ion implantationSurface | – | – | – | – | Power semiconductors, Silicon wafers |
| Standard ion implantationSurface | – | – | – | – | Power semiconductors |
| Ion irradiation of power semiconductorsSurface | – | – | – | – | Power semiconductors |
| Electron irradiationSurface | – | – | – | – | – |
| Materials analysisTesting | – | – | – | – | – |
| Multiphase measurementsTesting | – | – | – | – | – |
| Transfer services / technology transferEngineering | – | – | – | – | – |
1 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Accelerator systems / ion implantation systems | Helmholtz-Zentrum Dresden-Rossendorf (Ion Beam Center) | – | – | – | Ion Beam Center of the HZDR, Dresden-Rossendorf |
Additional services
Quality
The services in the field of ion implantation are processed in compliance with high quality standards according to ISO 9001.
| Evidence | Radeberg |
|---|---|
| ISO 9001 |
History
- 2023
Dr. Richard Gloaguen (HZDR) received 2nd place in the 2023 Saxon State Prize for Transfer; Managing Director Christian Christesen received the transfer special prize for the spin-off project TheiaX.
- 2026
First participation in the APEC conference in Texas as well as an exhibition at the IIT in Villach; ERDF funding for radiation detector manufacturing and an ERP system, as well as funding for the expansion of the Radeberg site by the Free State of Saxony.