Automation software and inspection solutions for Keyence VHX microscopes in wafer and material analysis
IDC Micro Inspection GmbH
SwitzerlandNew on Amplifa
About IDC Micro Inspection
IDC Micro Inspection GmbH develops ScanX, an automation and control software for Keyence VHX digital microscopes. The software automates microscope inspections through recipe-based scanning, automatic reference mark and fiducial detection, unlimited image stitching, and automatic particle detection with reports. Via an HTTP REST API, ScanX can be controlled from Python and MATLAB; KLARF and SINF map files are imported and processed. In addition, the company offers its own hardware such as multi-zone wafer vacuum chucks for 100–300 mm wafers, universal bread boards for the SL1 stage, and a customizable 300 mm inspection stage (MI-300 with VK-S1000K). ScanX controls Keyence microscopes and stages as well as Aerotech, Peak Metrology, and Prior Scientific stages. Customers come from semiconductor/wafer inspection, microscopy/material analysis, and research. The company offers online demos with a fully equipped VHX X1 with SL1 300 mm stage.
- Site
- Switzerland
- Processes
- Automated microscope inspection / microscopy scanning (ScanX software for Keyence VHX), Automation software for Keyence VHX microscopes (ScanX), Automatic scanning based on recipes, Reference mark/fiducial detection, Image stitching (unlimited), HTTP REST API for Python and MATLAB, KLARF and SINF map handling, Automatic particle detection and reports
- Materials
- Automation and control software, HTTP REST API (Python/MATLAB), IDC 300 mm inspection stage with VK-S1000K, Multi-zone wafer vacuum chuck for VHX SL1
- Industries
- Semiconductor/wafer inspection, Microscopy/material analysis, Research
- 01
Software development (ScanX)
- 02
Hardware development (stages, vacuum chucks, bread boards)
- 03
Integration & commissioning
- 04
Support & online demos
Products & Compatibility
Automation and control software
Recipe-based control of Keyence VHX microscopes with stitching, particle detection, and KLARF/SINF map handling.
HTTP REST API (Python/MATLAB)
Enables integration and control of ScanX processes in your own Python and MATLAB scripts.
IDC 300 mm inspection stage with VK-S1000K
Customizable positioning and inspection stage for 300 mm wafers.
Multi-zone wafer vacuum chuck for VHX SL1
For wafers 100–300 mm (flat, notch bottom, notch left) as well as dicing frames 6/8/12 inch.
Locations
Switzerland
CHDevelopment, integration and support
- Keyence VHX X1 microscope
- Keyence VHX-7000N (VHX-7100/7020)
- Keyence SL1 stage (300×300 mm)
- Keyence S750E stage (100×100 mm)
- IDC MI-300 300 mm stage with VK-S1000K
- Aerotech stages
- Peak Metrology stages
- Prior Scientific stages and controllers
- Multi-zone wafer vacuum chucks 100–300 mm
- Universal bread board (377×388 mm, M4/25 mm)
Components
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Automated microscope inspection / microscopy scanning (ScanX software for Keyence VHX)Inspection | – | – | – | – | – |
10 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Digital microscope | Keyence VHX X1 | – | – | – | – |
| Digital microscope | Keyence VHX-7000N with VHX-7100 or VHX-7020 | – | – | – | – |
| Positioning/inspection stage | Keyence SL1 | – | 300x300mm | – | – |
| Positioning/inspection stage | Keyence S750E | – | 100x100mm | – | – |
| Positioning/inspection stage | Aerotech | – | – | – | – |
| Positioning/inspection stage | Peak Metrology | – | – | – | – |
| Customizable 300mm stage | IDC MI-300 with VK-S1000K | – | 300mm | – | – |
| Positioning/inspection stage and controller | Prior Scientific | – | – | – | – |
| Wafer vacuum chuck (multi-zone) for Keyence VHX SL1 | – | – | for wafers 100–300mm; dicing frames 6/8/12 inch | – | – |
| Universal bread board for SL1 stage | – | – | 377x388mm, M4 threads on 25mm grid | – | – |
Additional services