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Imina Technologies – Fertigung

High-precision robotics and probing solutions for microscopy and semiconductor analysis.

Imina Technologies Logo

Imina Technologies SA

Switzerland (Headquarters)New on Amplifa

2009Founded
SA (stock corporation, Switzerland)Legal form
Semiconductors, micro- andFocus areas
Nanometer positioning resolutionmiBot™

About Imina Technologies

Imina Technologies SA is a company founded in Switzerland in 2009, emerging from more than ten years of research at the robotics laboratory of EPFL. The company develops and manufactures high-precision robotics solutions for microscopes, enabling samples of integrated circuits, wafers, MEMS and nanowires to be positioned, contacted and electrically characterized down to the nanometer scale. The miBot™ product family comprises the NANO product line for in-situ nanoprobing and electrical failure analysis in scanning electron microscopes (SEM, FIB, Dual Beam) as well as the MICRO product line for optical microscopes, probe stations and inspection tools; the Precisio™ software controls measurement sequences, recipe management and reporting. In addition to its product range, the company offers engineering services for mechanical, electrical and software integration into third-party equipment, nanoprobing and EFA services including sample preparation, as well as installation, training and support. Customers include leading semiconductor manufacturers and renowned research institutes worldwide; sales are conducted internationally through a partner network.

Site
Switzerland (Headquarters)
Processes
Nanoprobing and electrical failure analysis (EFA) as a service incl. sample preparation, Engineering services: mechanical, electrical and software integration of, Installation, training, online coaching, site acceptance tests, SWAP program, Engineering services (mechanical, electrical and software integration), Installation and advanced training, Online coaching, Site acceptance tests, SWAP program (replacement system within 3 business days)
Materials
Semiconductors (integrated circuits, wafers, MEMS, nanowires), Integrated Circuits, Wafers, MEMS, Nanowires
Certificates
Site Acceptance Tests, Feasibility studies in the application laboratory, SWAP program (replacement system within 3 business days)
Founded
2009
Industries
Semiconductor industry, Micro- and nanotechnology, Failure Analysis, Materials research / Research institutes
  1. 01

    Research & Development

  2. 02

    Mechanical, electrical and software integration

  3. 03

    Installation & Training

  4. 04

    Site Acceptance Tests

  5. 05

    Support & SWAP program

  6. 06

    Nanoprobing/EFA services

Samples & Measurement Objects

IC

Integrated Circuits

Electrical characterization of semiconductor devices at the smallest technology nodes.

Wafer

Wafers

Probing and failure analysis of semiconductor wafers.

MEMS

MEMS

Manipulation and characterization of MEMS structures.

NW

Nanowires

Isolation of individual particles and testing of nanowires down to the nanometer scale.

Locations

Standort Switzerland (Headquarters)

Switzerland (Headquarters)

CH

Headquarters, development, application laboratory and services

Materials
Semiconductor devices (ICs, wafers, MEMS, nanowires)
  • miBot™ nanoprobing systems (NANO Line)
  • miBot™ microprobing systems (MICRO Line)
  • Precisio™ software

Products & Solutions

NANO product line – In-situ nanoprobing for SEM, FIB, Dual Beam
NANO product line – In-situ nanoprobing for SEM, FIB, Dual BeamNanoprobing · Semiconductor industry
MICRO product line – Microprobing for optical microscopes and probe stations
MICRO product line – Microprobing for optical microscopes and probe stationsMicroprobing · Semiconductor industry
miBot™ mobile nanopositioning robots
miBot™ mobile nanopositioning robotsPrecision robotics · Micro- and nanotechnology

Inside the production

High-precision robotic solutions for microscopes
High-precision robotic solutions for microscopes
Application training at the demonstration center
Application training at the demonstration center
Installation of a NANO system in the customer's electron microscope
Installation of a NANO system in the customer's electron microscope
Online coaching with application engineers
Online coaching with application engineers
Integration into an atomic force microscope (AFM)
Integration into an atomic force microscope (AFM)
Integration into an in-situ nanoindenter (Alemnis ASA)
Integration into an in-situ nanoindenter (Alemnis ASA)

Industries

Semiconductor industryMicro- and nanotechnologyFailure AnalysisMaterials research / Research institutes

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
Nanoprobing and electrical failure analysis (EFA) as a service incl. sample preparationTesting––––Semiconductor devices (ICs, wafers, MEMS, nanowires)
Engineering services: mechanical, electrical and software integration ofEngineering–––––
Installation, training, online coaching, site acceptance tests, SWAP programEngineering–––––

5 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Nanoprobing systems (NANO product line) for SEM, FIB or Dual BeamImina Technologies miBot™ (NANO Line)––––
Microprobing systems (MICRO product line) for optical microscopes, probe stations orImina Technologies miBot™ (MICRO Line)––––
Integration into atomic force microscopes (AFM)Bruker Dimension Icon™, Dimension Edge™––––
Integration into in-situ nanoindentersAlemnis ASA––––
Integration into nanoindentersBruker Hysitron TI 980––––

Additional services

Engineering services (mechanical, electrical and software integration)Installation and advanced trainingOnline coachingSite acceptance testsSWAP program (replacement system within 3 business days)Nanoprobing and EFA services incl. sample preparationIntegration solutions for SEM, FIB, AFM, nanoindenters, Raman, probe stations, cryo-stations

Quality & Service

Site acceptance tests on customer-specific samples following a prior feasibility study in the application laboratory, together with a SWAP program featuring a replacement system within three business days, minimize downtime.

EvidenceSwitzerland (Headquarters)
Site Acceptance Tests
Feasibility studies in the application laboratory
SWAP program (replacement system within 3 business days)

History

  1. 2009

    Founding of Imina Technologies SA by Guillaume Boetsch and Benoît Dagon (alumni of the EPFL Robotic Systems Laboratory) after more than 10 years of research at EPFL.

  2. 2010

    Start of commercialization of the miBot™ – according to the company the world's most compact mobile robot with nanometer positioning resolution; awards include the KPMG Tomorrow's Market Award, Venture Kick, Venture Leaders, CTI Label.

  3. 2015

    Focus on the semiconductor industry; market launch of electrical probing solutions for characterization, reliability testing and failure analysis.

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