Development and manufacture of TOF-SIMS and LEIS instruments for surface analysis as well as analytical services in cooperation with Tascon.
IONTOF GmbH
MünsterNew on Amplifa
About IONTOF
IONTOF GmbH, based in Münster, develops and manufactures instruments for surface analysis based on ion beam technology. The product portfolio comprises TOF-SIMS instruments (Time-of-Flight Secondary Ion Mass Spectrometry) of the M6, M6 Plus and M6 Hybrid SIMS series as well as the LEIS instrument Qtac for quantitative characterization of the topmost atomic layer (Low Energy Ion Scattering). The instruments enable surface spectroscopy, surface imaging, depth profiling in dual-beam mode, 3D analysis, retrospective analysis and TOF MS/MS with CID fragmentation; the M6 Plus platform combines SIMS with in-situ scanning probe microscopy (SPM). The material classes analyzed include metals, semiconductors, polymers, glass, ceramics, biomaterials and pharmaceuticals. Applications are found in industries such as semiconductors, pharmaceuticals, paints and coatings, paper and catalysis. For analytical services, IONTOF cooperates closely with its sister company Tascon in Münster; the IONTOF Group comprises four companies in Germany, the USA and Japan. The headquarters are located in the Technologiehof near the University of Münster.
- Site
- Münster
- Processes
- TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) - surface analysis,, LEIS (Low Energy Ion Scattering) - quantitative characterization of the topmost atomic layer, TOF MS/MS with CID fragmentation for molecular structure elucidation, Dual-beam depth profiling, In-situ SPM (Scanning Probe Microscopy) combined with SIMS, Orbitrap SIMS for organic SIMS applications, Sample heating and cooling during analysis (closed-loop), Analytical services (surface analysis, in cooperation with Tascon; also XPS and optical
- Materials
- Metals, Semiconductors, Polymers, Glass, Ceramics, Biomaterials, Pharmaceuticals, Paints and coatings
- Certificates
- Analytical services (TOF-SIMS, LEIS, XPS), ISO 9001
- Founded
- 1989
- Industries
- Semiconductors, Polymers, Paints and coatings, Biomaterials, Pharmaceuticals, Glass
- 01
Development of ion technology and mass spectrometers
- 02
Engineering and design of the instruments
- 03
Manufacture and assembly of the TOF-SIMS and LEIS instruments
- 04
Software development (SurfaceLab 7)
- 05
Analytical services with Tascon
- 06
Service, training and worldwide support
Analytical methods and analyzed materials
TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry)
Highly sensitive surface analysis for spectroscopy, imaging, depth profiles and 3D analysis on metals, semiconductors, polymers, glass, ceramics and biomaterials.
LEIS (Low Energy Ion Scattering)
Quantitative characterization of the topmost atomic layer, especially for catalysts and metals.
TOF MS/MS with CID fragmentation
Molecular structure elucidation, e.g. for polymers and organic samples.
In-situ SPM combined with SIMS
Combination of high-resolution SIMS analysis and scanning probe microscopy on the M6 Plus platform.
Orbitrap SIMS
For organic SIMS applications on the M6 Hybrid SIMS combination instrument.
Dual-beam depth profiling
Sputtering and analysis with separate ion beams for depth profiles and 3D analysis.
Locations
Münster
DEHeadquarters with development, manufacture and assembly of the instruments
- Materials
- Metals, semiconductors, polymers, glass, ceramics, biomaterials, pharmaceuticals, paints and coatings, paper
- M6
- M6 Plus
- M6 Hybrid SIMS
- Qtac
- Nanoprobe 50 (bismuth cluster ion source)
- SurfaceLab 7
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) - surface analysis,Testing | – | – | – | – | Metals, Semiconductors, Polymers, Glass, Ceramics, Biomaterials, Pharmaceuticals, Paper, Paints and coatings, Organic tissue |
| LEIS (Low Energy Ion Scattering) - quantitative characterization of the topmost atomic layerTesting | – | – | – | – | Catalysts, Metals |
| TOF MS/MS with CID fragmentation for molecular structure elucidationTesting | – | – | – | – | Polymers, Organic samples |
| Dual-beam depth profilingTesting | – | – | – | – | – |
| In-situ SPM (Scanning Probe Microscopy) combined with SIMSTesting | – | – | – | – | – |
| Orbitrap SIMS for organic SIMS applicationsTesting | – | – | – | – | Organic materials |
| Sample heating and cooling during analysis (closed-loop)Testing | – | – | – | – | – |
| Analytical services (surface analysis, in cooperation with Tascon; also XPS and opticalTesting | – | – | – | – | Metals, Semiconductors, Polymers, Glass, Biomaterials, Pharmaceuticals, Catalysts |
5 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| TOF-SIMS instrument (high-end) | IONTOF M6 | – | – | – | Münster, Germany |
| TOF-SIMS + in-situ SPM platform | IONTOF M6 Plus | – | – | – | Münster, Germany |
| TOF-SIMS/Orbitrap combination instrument | IONTOF M6 Hybrid SIMS | – | – | – | Münster, Germany |
| LEIS instrument (Low Energy Ion Scattering) | IONTOF Qtac | – | – | – | Münster, Germany |
| Bismuth cluster ion source (up to 40 pA pulsed, lateral resolution < 50 nm, up to 50 kHz) | IONTOF Nanoprobe 50 | – | – | – | Münster, Germany |
Additional services
Quality
IONTOF itself operates TOF-SIMS and LEIS instruments in close cooperation with the testing laboratory Tascon; analytical services include XPS and optical characterization of the surface topography.
| Evidence | Münster |
|---|---|
| Analytical services (TOF-SIMS, LEIS, XPS) | |
| ISO 9001 |
History
- 1989
Founded by Prof. Alfred Benninghoven, Dr. Ewald Niehuis and Thomas Heller to commercialize the TOF-SIMS research of the University of Münster
- 1997
Foundation of the sister company Tascon as a specialized TOF-SIMS testing laboratory