Custom PVD coatings using magnetron sputtering, NEG coating, sputter sources and layer analysis
MagTec GmbH
EllerstadtNew on Amplifa
About MagTec
MagTec GmbH is a high-technology company based in Ellerstadt in the Palatinate, specializing in custom PVD coatings using magnetron sputtering technology. The company has more than 15 years of experience and coats metallic surfaces, glasses, plastics such as polycarbonate, polyimide (Kapton), PMMA and PE, as well as semiconductor wafers by means of DC, RF and reactive magnetron sputtering. Production takes place under cleanroom conditions (ISO 5) on approximately 150 m² with four PVD systems: two inline systems for substrates up to 400 x 1300 mm, one batch system for 3D geometries up to 400 x 300 x 300 mm and one system for the interior coating of tubes up to 120 mm diameter and 1.6 m length. In addition, on 100 m² of workshop space, the company manufactures components, masks and prototypes as well as custom magnetron sputter sources using milling, turning and electrical discharge machining. Fields of application include optics, the semiconductor industry, space and vacuum technology, and neutron physics; customers include research institutions such as ILL, PSI, Los Alamos National Laboratory, FRM II and TRIGA Mainz.
- Site
- Ellerstadt
- Processes
- PVD coating (magnetron sputtering), DC magnetron sputtering, RF magnetron sputtering, Reactive magnetron sputtering, Inline PVD coating of substrates up to 400 mm x 1300 mm, Batch coating of 3D geometries up to 400 mm x 300 mm x 300 mm, Interior coating of tubes up to 120 mm diameter and 1.6 m length, NEG coating (non-evaporable getter) of tubes and components for UHV applications
- Materials
- Polycarbonate, Polyimide (Kapton), Plexiglass (PMMA), PE (polyethylene), Glass, Metal foils, Semiconductor wafers, Metals (various coating materials, nearly the entire periodic table available)
- Certificates
- Cleanroom ISO 5 (production), Production-accompanying quality control (XRF, XRD, XRR, GID, UV/ViS), ISO 9001
- Industries
- Optics, Semiconductor industry, Space and vacuum technology, Neutron physics/research
- 01
Design and magnetic field simulation (MC)
- 02
Mask and component manufacturing (workshop)
- 03
PVD coating (magnetron sputtering)
- 04
Layer analysis (XRF, XRD, XRR, GID, UV/ViS)
Location
Ellerstadt
DEHeadquarters, production, workshop and laboratory
- Part weight / size
- Substrates up to 400 x 1300 mm; tubes up to 120 mm diameter,
- Materials
- Metals, glass, metal foils, plastics (PC, PI, PMMA, PE), semiconductor wafers
- 2 PVD inline coating systems (up to 400 x 1300 mm)
- PVD batch coating system for 3D geometries (up to 400 x 300 x 300 mm)
- PVD system for interior coating of tubes (up to 120 mm Ø, 1.6 m)
- Cleanroom ISO 5
- Milling machine
- Lathe
- Electrical discharge machining machine
- Bruker D8 ADVANCE ECO (XRD/XRR/GID)
- Bruker AXS S4 Pioneer (XRF)
- Perkin Elmer Lambda 950 UV/ViS spectrometer (175–3300 nm)
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| PVD coating (magnetron sputtering)Surface | – | 1300 mm × 400 mm | – | – | Metals, Glasses, Plastics (polycarbonate, polyimide/Kapton, PMMA, PE), Semiconductor wafers |
| DC magnetron sputteringSurface | – | – | – | – | Metals, Glass, Metal foils, Semiconductor wafers |
| RF magnetron sputteringSurface | – | – | – | – | Metals, Glass, Metal foils, Semiconductor wafers |
| Reactive magnetron sputteringSurface | – | – | – | – | Metals, Glass, Metal foils, Semiconductor wafers |
| Inline PVD coating of substrates up to 400 mm x 1300 mmSurface | – | 1300 mm × 400 mm | – | – | Metals, Glasses, Plastics, Semiconductor wafers |
| Batch coating of 3D geometries up to 400 mm x 300 mm x 300 mmSurface | – | 300 mm × 400 mm × 300 mm | – | – | Metals, Glasses, Plastics, Semiconductor wafers |
| Interior coating of tubes up to 120 mm diameter and 1.6 m lengthSurface | – | 1.6 m | – | – | Metals, Glasses |
| NEG coating (non-evaporable getter) of tubes and components for UHV applicationsSurface | – | – | – | – | Metals, Glasses |
| Manufacture of neutron guides (rectangular up to 300 x 300 mm, 1200 mm length; tubular 52–120 mmAssembly | – | 1600 mm × 300 mm × 300 mm | – | – | Metals, Glass |
| Manufacture of choppers for ultra-cold neutronsAssembly | – | – | – | – | Metals |
| Manufacture of Soller collimatorsAssembly | – | – | – | – | Metals |
| Design and manufacture of custom magnetron sputter sourcesEngineering | – | – | – | – | – |
| Magnetic field simulation (MC simulation)Engineering | – | – | – | – | – |
| MillingMachining | – | – | – | – | Metals |
| TurningMachining | – | – | – | – | Metals |
| Electrical discharge machiningMachining | – | – | – | – | Metals |
| Component and mask manufacturing as well as prototype constructionEngineering | – | – | – | – | Metals |
| XRF elemental analysis (analysis service)Testing | – | – | – | – | – |
| XRR, XRD, GID layer analysis (roughness, thickness, density, structure)Testing | – | – | – | – | – |
| UV/ViS transmission and reflectivity measurements (175–3300 nm)Testing | – | – | – | – | – |
9 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| PVD inline coating system | – | 2 | Substrates up to 400 mm x 1300 mm | – | Ellerstadt |
| PVD batch coating system for 3D geometries | – | 1 | up to 400 mm x 300 mm x 300 mm | – | Ellerstadt |
| PVD coating system for interior coating of tubes | – | 1 | Tubes up to 120 mm diameter, 1.6 m length | – | Ellerstadt |
| Milling machine | – | – | – | – | Ellerstadt (workshop) |
| Lathe | – | – | – | – | Ellerstadt (workshop) |
| Electrical discharge machining machine | – | – | – | – | Ellerstadt (workshop) |
| X-ray diffractometer (XRD/XRR/GID) | Bruker D8 ADVANCE ECO | 1 | – | – | Ellerstadt (laboratory) |
| X-ray spectrometer (XRF) | Bruker AXS S4 Pioneer | 1 | – | – | Ellerstadt (laboratory) |
| UV/ViS spectrometer | Perkin Elmer Lambda 950 | 1 | 175–3300 nm | – | Ellerstadt (laboratory) |
Additional services
Reference customers
Quality and analysis
Layer quality is checked during production in the company's own laboratory: roughness, thickness, density and structure via XRD, XRR and GID (Bruker D8 ADVANCE ECO), elemental analysis via XRF (Bruker AXS S4 Pioneer) as well as transmission and reflectivity in the range 175–3300 nm (Perkin Elmer Lambda 950). These measurement services are also available for external samples.
| Evidence | Ellerstadt |
|---|---|
| Cleanroom ISO 5 (production) | |
| Production-accompanying quality control (XRF, XRD, XRR, GID, UV/ViS) | |
| ISO 9001 |
Company history
Founding of the company; more than 15 years of experience in custom PVD coatings
- 2018
European patent application 17 728 516.0 for NEG coating (applicants: Pfeiffer Vacuum Components & Solutions GmbH and Movatec GmbH; inventors: Dr. A. Kraft and Dr. T. Lauer)