Equipment and modules for megasonic cleaning, substrate drying and media temperature control for wet chemical production.
METRONICS Semiconductor Equipment GmbH
New on Amplifa
About METRONICS Semiconductor Equipment
METRONICS Semiconductor Equipment GmbH offers equipment and modules used in the wet chemical production of semiconductor, optics and medical products. The product range includes substrate cleaning modules, substrate drying modules, equipment for temperature control of process media, process tanks made of high-purity quartz as well as high-purity valves, fittings and custom pre-formed, dimensionally stable PFA tubing. Some products, including the megasonic cleaning system, are developed and manufactured in-house and are used worldwide by wafer and chip manufacturers as well as research institutes. On request, standard products can be adapted to any application in order to improve process results, equipment lifetime and production throughput. The company is managed by its founders Dipl.-Ing. (FH) Marco Meyer and Dipl.-Ing. (TH) Rosemarie Kehr, who have many years of experience in the manufacture, distribution and service of semiconductor equipment.
- Processes
- Megasonic cleaning of wafers and substrates, Ultrasonic cleaning, Drying of wafers and substrates (spin dryer), Temperature control of process media, Megasonic/ultrasonic cleaning systems, Substrate drying (spin dryer), Media temperature control, Substrate cleaning modules
- Materials
- Quartz (high-purity, for process tanks), PFA (tubing), PFA, high-purity quartz
- Founded
- 2001
- Industries
- Semiconductor industry, Solar industry, Optics industry, Chemical industry, Medical technology, Research
- 01
Development
- 02
CAD design
- 03
Manufacturing
- 04
Adaptation to application
- 05
Service
Materials and Media
PFA
Custom pre-formed and dimensionally stable PFA tubing for high-purity applications.
high-purity quartz
Material for process tanks in wet chemical production.
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Megasonic cleaning of wafers and substratesCleaning (Other) | – | – | – | – | Wafers, Substrates |
| Ultrasonic cleaningCleaning (Other) | – | – | – | – | Wafers, Substrates |
| Drying of wafers and substrates (spin dryer)Cleaning (Other) | – | – | – | – | Wafers, Substrates |
| Temperature control of process mediaOther | – | – | – | – | – |
5 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Megasonic cleaning system | METRONICS Semiconductor Equipment GmbH | – | – | – | – |
| Substrate cleaning module | METRONICS Semiconductor Equipment GmbH | – | – | – | – |
| Substrate drying module | METRONICS Semiconductor Equipment GmbH | – | – | – | – |
| Media temperature control unit | METRONICS Semiconductor Equipment GmbH | – | – | – | – |
| Process tank made of high-purity quartz | METRONICS Semiconductor Equipment GmbH | – | – | – | – |
Additional services
Reference customers
History
- 2001
Start of business operations by the founders Marco Meyer and Rosemarie Kehr.