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NanoWorld – Fertigung

Develops and manufactures in cleanrooms atomic force microscope probes (AFM probes) for nanotechnology.

NanoWorld Logo

NanoWorld AG

Neuchâtel (CH)New on Amplifa

2000Founded
10–388Probes per unit (pack to wafer)
≤ 2 nmTip radius (SuperSharpSilicon)

About NanoWorld

NanoWorld AG, headquartered in Neuchâtel, Switzerland, specializes in the development and manufacture of probes for atomic force microscopy (AFM/SPM). Founded in 2000 by Manfred Detterbeck, the company produces in its own cleanrooms silicon probes of monolithic design, silicon nitride probes with Pyrex glass chips, and ultra-short cantilevers for high-speed AFM. The portfolio is complemented by coatings such as aluminum reflex, gold, PtIr5, diamond and magnetic layers. In addition to standard products such as the Pointprobe series, the company offers custom special developments, including a dedicated probe for Zeiss Veritekt microscopes. Customers include research institutions and companies from nanotechnology, materials science, semiconductor manufacturing, life sciences and physics. The site is located near Microcity (EPFL) and CSEM.

Site
Neuchâtel
Processes
Manufacture of AFM/SPM atomic force probes (silicon probes, monolithic design), Manufacture of probes for contact mode AFM (Pointprobe® CONT, CONTSC, Arrow™ CONT), Manufacture of probes for non-contact/tapping mode AFM, Manufacture of ultra-short cantilevers for high-speed AFM (USC, resonance 1.2-5 MHz), Manufacture of Pyrex-Nitride probes (silicon nitride cantilevers and tips), Aluminum reflex coating (30 nm Al on the detector side of the cantilever), Gold coating (70 nm Cr/Au, one-sided or both-sided, on request), PtIr5 coating (25 nm both-sided, conductive)
Materials
Silicon (highly doped single crystal), Silicon nitride (SiN), Pyrex nitride (Pyrex glass chip with silicon nitride), Aluminum (reflex coating, 30 nm), Gold (coating, 70 nm), Chromium/gold (coating), Platinum-iridium alloy (PtIr5), Diamond (polycrystalline, coating)
Certificates
Data sheets with guaranteed values
Founded
2000
Industries
Nanotechnology, Materials science, Semiconductor industry, Life sciences/Life Science, Physics, Biology
  1. 01

    R&D and special development

  2. 02

    Cleanroom production (microstructuring of silicon wafers)

  3. 03

    Coating (reflex, gold, PtIr5, diamond, magnetic)

  4. 04

    Quality inspection

  5. 05

    Packaging (packs of 10/20/50 or wafer)

  6. 06

    Worldwide shipping

Materials and Processes

Si

Highly doped silicon single crystal (0.01–0.025 Ohm·cm)

Monolithic material for cantilever, tip and holding chip; chemically inert, suitable for liquids and electrochemical cells.

SiN

Silicon nitride (SiN)

Cantilevers and oxide-sharpened pyramidal tips of the Pyrex-Nitride probes.

Pyrex

Pyrex glass (holding chip)

Chip material of the Pyrex-Nitride probes for contact and dynamic mode.

Al

Aluminum reflex coating

30-nm layer on the detector side, increases laser reflection by a factor of 2.5.

Cr/Au

Chromium/gold coating (70 nm)

Reflex and conductive coating on one or both sides, on request.

PtIr5

Platinum-iridium alloy (PtIr5, 25 nm)

Conductive coating on both sides for electrical measurement methods.

DT/CDT

Polycrystalline diamond (approx. 100 nm) or HDC/DLC

Wear-resistant tip coating for hard contact, nanostructuring and FMM.

Co

Cobalt alloy / soft magnetic layer

Magnetic coatings for MFM applications (coercivity of the soft magnetic layer approx. 0.75 Oe).

USC

Quartz-like material

Cantilevers of the Ultra-Short Cantilever series with resonance frequencies from 1.2 to 5 MHz.

Locations

Standort Neuchâtel

Neuchâtel

CH

Headquarters, R&D and cleanroom production

Part weight / size
Holding chip 3.4 × 1.6 × 0.3 mm; cantilever 10–450 µm
Lot size
Packs of 10, 20, 50; wafers with 380–388 probes
Materials
Silicon, silicon nitride, Pyrex, coating metals
  • Cleanroom

Products

Pointprobe® silicon AFM probe
Pointprobe® silicon AFM probeCleanroom manufacturing · Nanotechnology
Contact-mode AFM probes
Contact-mode AFM probesSilicon · Materials science
Non-contact / tapping-mode probes
Non-contact / tapping-mode probesSilicon · Research
AFM probes for bio/life science
AFM probes for bio/life sciencePyrex-Nitride · Life Science
Ultra-Short Cantilevers (High-Speed AFM)
Ultra-Short Cantilevers (High-Speed AFM)Quartz-like material · High-speed AFM
Coated probes (gold, diamond, magnetic)
Coated probes (gold, diamond, magnetic)Coating · Electrical/magnetic AFM

Inside the production

Probes Catalog
Probes Catalog
Ultra-Short Cantilevers
Ultra-Short Cantilevers
Pyrex-Nitride probes
Pyrex-Nitride probes

Industries

NanotechnologyMaterials scienceSemiconductor industryLife sciences/Life SciencePhysicsBiologyResearch

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
Manufacture of AFM/SPM atomic force probes (silicon probes, monolithic design)Engineering–––Wafers with 380-388 probesSilicon (highly doped single crystal), Silicon nitride, Pyrex nitride
Manufacture of probes for contact mode AFM (Pointprobe® CONT, CONTSC, Arrow™ CONT)EngineeringCantilever length 445-455 µm or 220-230 µm · Tip radius typ. < 8 nm (Pointprobe), <450 µm × 50 µm × 2 µm (cantilever thickness)–10 pieces – 380 pieces (wafer)Silicon
Manufacture of probes for non-contact/tapping mode AFMEngineering––––Silicon
Manufacture of ultra-short cantilevers for high-speed AFM (USC, resonance 1.2-5 MHz)EngineeringTip radius typ. < 10 nm10 µm––Quartz-like material, High Density Carbon/Diamond Like Carbon (HDC/DLC), Silicon (support chip)
Manufacture of Pyrex-Nitride probes (silicon nitride cantilevers and tips)EngineeringTip radius typ. < 10 nm100 µm––Silicon nitride (SiN), Pyrex glass
Aluminum reflex coating (30 nm Al on the detector side of the cantilever)Surface30 nm layer thickness–––Aluminum
Gold coating (70 nm Cr/Au, one-sided or both-sided, on request)Surface70 nm layer thickness–––Gold, Chromium/gold
PtIr5 coating (25 nm both-sided, conductive)Surface25 nm layer thickness–––Platinum-iridium alloy (PtIr5)
Diamond coating of tips (DT: ~100 nm polycrystalline diamond; CDT: conductive)Surfaceapprox. 100 nm layer thickness–––Diamond (polycrystalline)
Magnetic coatings (hard magnetic coating: cobalt alloy; soft magnetic coating)Surface––––Cobalt alloy, Soft magnetic material (coercivity approx. 0.75 Oe)
Manufacture of SuperSharpSilicon™ tips (SSS, radius down to 2 nm)EngineeringRadius guaranteed < 5 nm (yield 80%) · Tip radius approx. 2 nm10 - 15 µm (tip height)––Silicon
Manufacture of high aspect ratio tips (AR5/AR5T, aspect ratio up to 7:1)EngineeringAspect ratio min. 5:1 guaranteed · Tip radius typ. 10 nm (guaranteed < 1510 - 15 µm (tip height)––Silicon
Special developments / customized probes (Customized Solutions)Engineering––––Silicon, Silicon nitride

1 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Cleanroom (cleanroom production)––––Neuchâtel, Switzerland

Additional services

Special developments and custom AFM probesProduct development and research

Reference customers

Zeiss (AFM probe ZEILR for Zeiss Veritekt AFMs, implied)Bruker (ScanAsyst compatibility, implied)

Quality

Guaranteed values such as tip radius, cantilever dimensions and yields (e.g. SuperSharpSilicon: radius < 5 nm at 80% yield) are documented per product; data sheets are included with the packs.

EvidenceNeuchâtel
Data sheets with guaranteed values

History

  1. 2000

    Founded in Neuchâtel, Switzerland, by Manfred Detterbeck with venture capital.

  2. 2002

    Acquisition of the Nanosensors brand and technology.

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