Metrology and process control solutions for semiconductor manufacturing: materials, optical and chemical metrology as well as software.
Nova Ltd.
New on Amplifa
About Nova
Nova is a provider of metrology and process control solutions for semiconductor manufacturing. The portfolio comprises Dimensional Metrology (optical interferometry, scatterometry, advanced imaging, hybrid metrology), Materials Metrology (SIMS, XPS, XRF, Raman spectroscopy) and Chemical Metrology (titration, optical spectrophotometry, HPLC, CVS) for backend wafer-level packaging and frontend process steps such as dual-damascene. In addition, Nova offers software solutions based on physical modeling, machine learning and high-performance computing for complex 3D and HAR structures. The platforms deliver in-line measurement data that helps manufacturers improve device performance, yield and time-to-market. Target industries include, among others, advanced packaging, wafer fabrication, DRAM as well as logic and memory technologies in the field of artificial intelligence.
- Processes
- Dimensional Metrology (Optical Interferometry), Dimensional Metrology (Optical Scatterometry), Advanced Imaging, Hybrid Metrology, Secondary Ion Mass Spectrometry (SIMS), X-Ray Photoelectron Spectroscopy (XPS), X-Ray Fluorescence (XRF), Raman Spectroscopy
- Materials
- Dimensional Metrology (Optical Interferometry, Scatterometry), Advanced Imaging, Hybrid Metrology, Secondary Ion Mass Spectrometry (SIMS), X-Ray Photoelectron Spectroscopy (XPS), X-Ray Fluorescence (XRF), Raman Spectroscopy, Titration
- Industries
- Semiconductor manufacturing, Advanced Packaging, DRAM, Logic & Memory, Artificial Intelligence
- 01
Dimensional Metrology (Optical Interferometry, Scatterometry, Advanced
- 02
Materials Metrology (SIMS, XPS, XRF, Raman spectroscopy)
- 03
Chemical Metrology (Titration, optical spectrophotometry, HPLC, CVS)
- 04
Modeling software (physical modeling, machine learning, HPC)
Technologies and Processes
Dimensional Metrology (Optical Interferometry, Scatterometry)
In-line and integrated optical metrology platforms for process control in advanced semiconductor technologies.
Advanced Imaging
Image-based metrology for process control throughout the semiconductor manufacturing cycle.
Hybrid Metrology
Combination of multiple metrology techniques with modeling algorithms for complex measurement tasks.
Secondary Ion Mass Spectrometry (SIMS)
Highly sensitive in-line materials analysis that can replace laboratory-based reference metrology in the fab.
X-Ray Photoelectron Spectroscopy (XPS)
Analysis of thin films and surfaces for materials metrology in semiconductor manufacturing.
X-Ray Fluorescence (XRF)
Non-contact film thickness and composition measurement on high-productivity platforms.
Raman Spectroscopy
Materials characterization for scalable in-line solutions in the fab.
Titration
Chemical analysis for real-time monitoring and replenishment of electrolytes in electroplating processes.
Optical Spectrophotometry
Analysis of chemical baths to ensure high-quality electroplating processes.
High-Performance Liquid Chromatography (HPLC)
Chemical metrology for organic analytes in process baths.
Cyclic Voltammetric Stripping (CVS)
Determination of additives in plating baths for backend packaging and dual-damascene.
Modeling Software (Physical Modeling, Machine Learning, HPC)
Modeling and big-data algorithms for highly accurate metrology on complex 3D structures.
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Dimensional Metrology (Optical Interferometry)Inspection | – | – | – | – | – |
| Dimensional Metrology (Optical Scatterometry)Inspection | – | – | – | – | – |
| Advanced ImagingInspection | – | – | – | – | – |
| Hybrid MetrologyInspection | – | – | – | – | – |
| Secondary Ion Mass Spectrometry (SIMS)Inspection | – | – | – | – | – |
| X-Ray Photoelectron Spectroscopy (XPS)Inspection | – | – | – | – | – |
| X-Ray Fluorescence (XRF)Inspection | – | – | – | – | – |
| Raman SpectroscopyInspection | – | – | – | – | – |
| Chemical Metrology / TitrationInspection | – | – | – | – | – |
| Optical SpectrophotometryInspection | – | – | – | – | – |
| High-Performance Liquid Chromatography (HPLC)Inspection | – | – | – | – | – |
| Cyclic Voltammetric Stripping (CVS)Inspection | – | – | – | – | – |
| Modeling Software (Physical Modeling, Machine Learning, HPC)Engineering | – | – | – | – | – |
25 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Dimensional Metrology Metrology Platform | Nova Nova i500 | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova i570 HP | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova i550 | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova T550 | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova T500 | – | – | – | – |
| Metrology Platform | Nova Nova WMC | – | – | – | – |
| Metrology Platform | Nova Nova MMSR+ | – | – | – | – |
| Metrology Platform | Nova Nova Prism | – | – | – | – |
| Metrology Platform | Nova Nova VeloCD | – | – | – | – |
| Materials Metrology Metrology Platform | Nova Nova VeraFlex III+ | – | – | – | – |
| Materials Metrology Metrology Platform | Nova Nova VeraFlex IV | – | – | – | – |
| Materials Metrology Metrology Platform | Nova Nova VeraFlex III | – | – | – | – |
| Metrology Platform | Nova Nova RACS | – | – | – | – |
| Metrology Platform | Nova Nova QED | – | – | – | – |
| Metrology Platform | Nova Nova Metrion | – | – | – | – |
| Metrology Platform | Nova Nova Elipson | – | – | – | – |
| Chemical Metrology Platform | Nova Nova Ancolyzer | – | – | – | – |
| Chemical Metrology Platform | Nova Nova AncoScene | – | – | – | – |
| Chemical Metrology Platform | Nova Nova AncoFlex | – | – | – | – |
| Chemical Metrology Platform | Nova Nova DMR | – | – | – | – |
| Software Platform | Nova Nova MARS | – | – | – | – |
| Software Platform | Nova Nova Fit | – | – | – | – |
| Software Platform | Nova Nova Hub | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova i580 | – | – | – | – |
| Dimensional Metrology Metrology Platform | Nova Nova SemDex Series | – | – | – | – |
Additional services