Software for SECS/GEM300 host simulation, integration testing and compliance validation in the semiconductor industry

Semilate

New on Amplifa

SemilateManagement/Contact: Hannes Enzesberger MSc

About Semilate

Semilate offers a SECS/GEM300 host simulation software for the semiconductor industry. The tool supports equipment manufacturers and factory automation teams with integration testing by automatically executing common GEM300 test scenarios and verifying compliance with SEMI standards. The equipment state is displayed via visual overviews, including for E87 (Carriers/Loadports), E40/E94 (Jobs), E90/E116 (Substrates/Modules) and E30 (Recipes). Users can create, save and send individual SECS messages in E173 SMN; all messages are logged in annotated logs and made available for detailed analysis. The software runs on-premises and is accessible via the browser; a user management system with two privilege levels is integrated. An intuitive user interface with explanations also makes it easier for new professionals to get started with SECS/GEM300 testing.

Processes: SECS/GEM300 host simulation / integration test software, SECS/GEM300 host simulation and integration testing, GEM300 scenario testing and compliance validation, Visualization of the equipment state (E87, E40/E94, E90/E116, E30), Sending and managing individual SECS messages (E173 SMN), Message logging with annotations, On-premises deployment with browser access, User management with two privilege levels
Materials: SEMI E87 (Carriers/Loadports), SEMI E40/E94 (Process/Control Jobs), SEMI E90/E116 (Substrate/Module), SEMI E30 (Recipes), SECS-II Message Notation (SMN)
Industries: Semiconductor industry, Equipment manufacturers / factory automation

01
Requirements analysis of the equipment interface
02
Configuration of GEM300 test scenarios
03
Host simulation and message exchange (SECS-II/E173 SMN)
04
Visualization and management of the equipment state
05
Analysis of the annotated message logs
06
Compliance validation according to SEMI SECS/GEM300

Functions and Standards

E87

SEMI E87 (Carriers/Loadports)

Visual monitoring and invocation of the E87 standard services for loadports and carriers.

E40/E94

SEMI E40/E94 (Process/Control Jobs)

Management and creation of process and control jobs according to both state models.

E90/E116

SEMI E90/E116 (Substrate/Module)

Display of substrates, locations and modules including E116 performance states.

E30

SEMI E30 (Recipes)

Requesting, saving and sending recipes via integrated services.

E173

SECS-II Message Notation (SMN)

Standardized creation and annotation of individual SECS messages.

Location

Software development and sales

Product Modules

**Scenario View – GEM300 Compliance Test Scenarios**SECS/GEM300 simulation · semiconductor industry

**Load Port and Carrier Status Display**E87 visualization · equipment integration

**Process and Control Jobs**E40/E94 management · factory automation

**Substrate, Location and Module View**E90/E116 visualization · semiconductor industry

**Annotated SECS Message Details**Message logging (E173 SMN) · testing and analysis

Inside the production

Management and execution of GEM300 test scenarios

Carrier processing and load port control

E87 Proceed-With-Carrier request in detail

Industries

Semiconductor industryEquipment manufacturers / factory automation

Processes & technical limits

Processes	Tolerance	Max. part	Weight	Lot size	Materials
SECS/GEM300 host simulation / integration test softwareEngineering	–	–	–	–	–

Additional services

SECS/GEM300 host simulation and integration testingGEM300 scenario testing and compliance validationVisualization of the equipment state (E87, E40/E94, E90/E116, E30)Sending and managing individual SECS messages (E173 SMN)Message logging with annotationsOn-premises deployment with browser accessUser management with two privilege levels