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SemiMat – Fertigung

New production, cleaning, repair and measurement of quartz glass components for the semiconductor industry

SemiMat Logo

SemiMat GmbH

BüdingenNew on Amplifa

Part of the Schunk GroupCorporate affiliation
25 yearsExperience in the quartz glass field
ISO class 5Cleanroom
HRB 7368, District Court FriedbergRegister court

About SemiMat

SemiMat GmbH, based in Büdingen, specialises in quartz glass (silica, fused silica) and offers a complete service for quartz glass components: from material selection and procurement, through new production in single-piece and series manufacturing, to cleaning, repair and measurement of used parts. The company is part of the Schunk Group and can look back on 25 years of experience in the quartz glass field. For cleaning, a cleanroom of ISO class 5 is available, in which components are cleaned wet-chemically (with various acids), mechanically and thermally, and packaged. Repairs include fusing of cracks, reworking of chipped areas, replacement of attached parts such as ground joints and flanges, as well as flame polishing and mechanical machining. SemiMat also sells quartz glass raw materials (tubes, rods, plates, blocks, flanges, rings, discs), cut to size using its own cutting equipment, made from high-purity quartz materials from its partner Momentive. As the official and exclusive European representative of the Korean manufacturer Vision Tech Co., Ltd., the company primarily serves the semiconductor industry. A collection and delivery service with its own vehicles and transport boxes rounds off the range of services.

Site
Büdingen
Processes
New production of quartz glass products (single-piece and series manufacturing), Preparation of technical drawings, Repair of quartz glass components (fusing of cracks), Repair of chipped areas, Replacement of defective attached parts (ground joints, flanges), Flame polishing of quartz glass surfaces, Machining of quartz glass, Wet-chemical cleaning using various acids
Materials
Quartz glass (silica, fused silica), High-purity quartz materials (Momentive)
Certificates
ISO 9001:2015, ISO 9001
Industries
Semiconductor industry
  1. 01

    Consulting & material selection

  2. 02

    Procurement of quartz glass raw materials

  3. 03

    Cutting using in-house cutting equipment

  4. 04

    Manufacturing / new production

  5. 05

    Cleaning in ISO class 5 cleanroom

  6. 06

    Measurement

  7. 07

    Packaging & transport (collection and delivery service)

Materials & Processes

Fused Silica

Quartz glass (silica, fused silica)

Base material of all manufactured, cleaned and repaired components, with special material properties for the semiconductor industry.

Hi-Q

High-purity quartz materials (Momentive)

High-purity specialty materials with high optical clarity and durability in extreme environments.

Locations

Standort Büdingen

Büdingen

DE

Headquarters with production, cleanroom (ISO class 5) and warehouse

Lot size
Single piece to series
Materials
Quartz glass
  • 3D coordinate measuring machine
  • Cleaning systems in ISO class 5 cleanroom
  • Cutting equipment for quartz glass

Components

Upper Dome
Upper DomeQuartz glass · Semiconductor industry
Upper Liner
Upper LinerQuartz glass · Semiconductor industry
Lower Liner
Lower LinerQuartz glass · Semiconductor industry
Lower Dome
Lower DomeQuartz glass · Semiconductor industry
AMAT Centura Epi Component
AMAT Centura Epi ComponentQuartz glass · Semiconductor industry
Epi Lamp
Epi LampQuartz glass · Semiconductor industry
Wafer Lift Shaft
Wafer Lift ShaftQuartz glass · Semiconductor industry
Susceptor Support Shaft
Susceptor Support ShaftQuartz glass · Semiconductor industry
Insert Inject
Insert InjectQuartz glass · Semiconductor industry
Disk Gas LAM
Disk Gas LAMQuartz glass · Semiconductor industry
Hitachi Window
Hitachi WindowQuartz glass · Semiconductor industry
RTP Lamp
RTP LampQuartz glass · Semiconductor industry
LAM Confinement Ring
LAM Confinement RingQuartz glass · Semiconductor industry

Inside the production

Quartz glass raw material
Quartz glass raw material
Quartz glass products
Quartz glass products
Repair of quartz glass components
Repair of quartz glass components
Schunk Group Headquarter
Schunk Group Headquarter

Industries

Semiconductor industry

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
New production of quartz glass products (single-piece and series manufacturing)Engineering–––Single piece – SeriesQuartz glass
Preparation of technical drawingsEngineering–––––
Repair of quartz glass components (fusing of cracks)Joining––––Quartz glass
Repair of chipped areasSurface––––Quartz glass
Replacement of defective attached parts (ground joints, flanges)Assembly––––Quartz glass
Flame polishing of quartz glass surfacesSurface––––Quartz glass
Machining of quartz glassMachining––––Quartz glass
Wet-chemical cleaning using various acidsSurface––––Quartz glass
Mechanical cleaning processesSurface––––Quartz glass
Thermal cleaning processesHeat treatment––––Quartz glass
Cleaning and packaging in ISO class 5 cleanroomSurface––––Quartz glass
Measurement of quartz glass components (simple measurement to 3D coordinate measuring machine)Inspection––––Quartz glass
Cutting of quartz glass raw materials using in-house cutting equipmentMachining––––Quartz glass
Supply of quartz glass raw materials (tubes, rods, plates, blocks, flanges, rings, discs)Engineering––––Quartz glass
Collection and delivery service including packaging in transport boxesAssembly–––––

3 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
3D coordinate measuring machine––––Büdingen
Cleaning systems in ISO class 5 cleanroom––––Büdingen
Cutting equipment for quartz glass––––Büdingen

Additional services

New production of quartz glass components (single-piece and series manufacturing)Consulting and development of special quartz glass componentsPreparation of technical drawingsMaterial selection and procurementSales of quartz glass raw materials (tubes, rods, plates, blocks, flanges, rings, discs)Cutting using in-house cutting equipmentWarehousing of common quartz materialsCleaning of quartz glass parts (wet-chemical with acids, mechanical, thermal) in the cleanroomRepair of quartz glass components (fusing of cracks, reworking of chipped areas, replacementMeasurement including 3D coordinate measuring machineCollection and delivery service including packaging and transport with own vehicles

Quality

SemiMat GmbH is certified to ISO 9001:2015 (DEKRA, registration number 90515281/3, valid until 11.05.2027) and operates an ISO class 5 cleanroom for inspection, cleaning and packaging. Measurement ranges from simple measurements to 3D coordinate measuring machines for highly complex components.

EvidenceBüdingen
ISO 9001

History

  1. SemiMat is now part of the Schunk Group

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