Ultra-precision positioning systems, metrology and automation solutions for nano- and microtechnology – Made in Oldenburg.
SmarAct GmbH
Oldenburg, Germany · Berkeley, USA · Shenzhen, ChinaNew on Amplifa
Precision technology from Oldenburg
The SmarAct Group, headquartered in Oldenburg, develops and manufactures ultra-precision positioning systems, metrology and automation solutions for applications at the nano, micro and meso scale. Founded in 2005 by two engineers, the company covers the entire production process from development, design and mechanical manufacturing through to sales. The portfolio includes piezo- and electromagnetically driven linear and rotary positioners, hexapod-like multi-axis systems, micro-grippers, interferometric displacement measuring systems (PICOSCALE), optical encoders (METIRIO) and automation stations built on the P50 micro-assembly platform. Systems are designed for extreme environments such as ultra-high vacuum, cryogenics, radiation and cleanroom. With more than 300 employees across three business divisions (Motion, Metrology, Automation) and locations in Oldenburg, Berkeley and Shenzhen, SmarAct supplies industries such as semiconductor manufacturing, photonics, life sciences, materials science, nanotechnology and high-energy research worldwide.
- Site
- Oldenburg
- Processes
- Automated micro-assembly (automation stations based on the P50 micro-assembly platform), Ultra-precision positioning systems and robots (SMARBOTIC), Positioners with electromagnetic direct drives (SMARSHIFT), Nanopositioning scanners based on piezo-driven flexure hinges (SMARFLEX), Stick-slip piezo positioners (SMARSLIDE), nanometer resolution, Non-contact ultra-precise displacement measurement (PICOSCALE interferometer), METIRIO optical encoder for closed-loop nanopositioning, Rental of metrology equipment (PICOSCALE interferometer and vibrometer, weekly or monthly)
- Materials
- Stick-slip piezo drives, Flexure hinge drives, Electromagnetic direct drives, Multi-axis systems and robots, Michelson interferometry, Optical encoder, Micro-assembly platform
- Founded
- 2005
- Employees
- 300+
- Industries
- Semiconductor manufacturing, Photonics/optics, Life sciences/life sciences, Materials science, Nanotechnology, High-energy research/synchrotrons
- 01
Development and design
- 02
Mechanical manufacturing
- 03
Electronics/sensor head integration
- 04
Assembly and calibration
- 05
Testing (interferometric measurements)
- 06
Sales and service
Technologies & Processes
Stick-slip piezo drives
Patented drive for macroscopic travel ranges with sub-nanometer resolution and high speeds.
Flexure hinge drives
Piezo-driven nanopositioning scanners for flexible, ultra-precise positioning.
Electromagnetic direct drives
Positioners for demanding tasks in industrial automation.
Multi-axis systems and robots
Ultra-precision positioning systems and robots for multi-axis applications.
Michelson interferometry
Non-contact, ultra-precise displacement and vibration measurements, including laser scanning vibrometry.
Optical encoder
Compact readhead for closed-loop nanopositioning, available as an OEM and standalone component.
Micro-assembly platform
Basis for fully automated production stations for the ultra-precise assembly of the smallest components.
Locations
Oldenburg (Headquarters, SmarAct GmbH)
DEHeadquarters, development, mechanical manufacturing, assembly (Motion)
- Lot size
- Engineering samples to small series (Automation)
- Materials
- Metal, piezo and electromagnetic components
- Micro-assembly platform P50
- PICOSCALE interferometer
- Laser scanning vibrometer
- MCS2 controller systems
Oldenburg (SmarAct Metrology GmbH & Co. KG)
DEMetrology: metrology, measurement services, laboratory
- PICOSCALE interferometers and vibrometers
Oldenburg (SmarAct Automation GmbH & Co. KG)
DEAutomation: automation stations, contract manufacturing, micro-assembly
- Lot size
- Engineering samples to small series
- Micro-assembly platform P50
Berkeley, CA
USSubsidiary SmarAct Inc. (North America sales)
Shenzhen
CNSmarAct Precision Technology (Shenzhen) Co., Ltd.
Products & Systems
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| Automated micro-assembly (automation stations based on the P50 micro-assembly platform)Assembly | – | – | – | – | – |
| Ultra-precision positioning systems and robots (SMARBOTIC)Engineering | – | – | – | – | – |
| Positioners with electromagnetic direct drives (SMARSHIFT)Engineering | – | – | – | – | – |
| Nanopositioning scanners based on piezo-driven flexure hinges (SMARFLEX)Engineering | – | – | – | – | – |
| Stick-slip piezo positioners (SMARSLIDE), nanometer resolutionEngineering | Sub-nanometer resolution (stick phase) | – | – | – | – |
| Non-contact ultra-precise displacement measurement (PICOSCALE interferometer)Testing | – | – | – | – | – |
| METIRIO optical encoder for closed-loop nanopositioningTesting | – | – | – | – | – |
| Testing | – | – | – | – | – |
| Rental of metrology equipment (PICOSCALE interferometer and vibrometer, weekly or monthly)Testing | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Engineering | – | – | – | – | – |
| Contract manufacturing: production of engineering samples and small series (micro-assembly)Assembly | – | – | – | Engineering samples – Small series | – |
| Mechanical manufacturing (in-house manufacturing across the entire production process fromMachining | – | – | – | – | – |
10 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| Micro-assembly platform / automation station | SmarAct P50 | – | – | – | Oldenburg, Germany |
| Ultra-precision positioning systems and robots (technology platform) | SmarAct SMARBOTIC | – | – | – | – |
| Positioners with electromagnetic direct drives | SmarAct SMARSHIFT | – | – | – | – |
| Nanopositioning scanners (piezo-driven flexure hinges) | SmarAct SMARFLEX | – | – | – | – |
| Stick-slip piezo positioners | SmarAct SMARSLIDE | – | – | – | – |
| Interferometer | SmarAct PICOSCALE | – | – | – | – |
| Optical encoder (readhead) | SmarAct METIRIO | – | – | – | – |
| Positioning system (multi-axis) | SmarAct SMARPOD 70.42 (base plate diameter 70 mm, weight 200 g) | – | 70 mm base plate diameter | – | – |
| Controller system | SmarAct MCS2 | – | – | – | – |
| Laser scanning vibrometer | SmarAct PICOScale Vibrometer | – | – | – | – |
Additional services
History
- 2005
Founded in Oldenburg by the two engineers Christoph and Axel, starting out in a garage
Growth into a corporate group with more than 300 employees, three business divisions (Motion, Metrology, Automation) and international locations in the USA and China