Develops and manufactures instruments, components and systems for surface analysis, electron spectroscopy and thin-film deposition in UHV.
SPECS Surface Nano Analysis GmbH
Berlin · Hünstetten · Zurich · Mansfield, MA (USA) · Beijing (China)New on Amplifa
About SPECSGROUP
SPECS Surface Nano Analysis GmbH, based in Berlin, develops, designs and produces instruments, components and complete systems for surface science, materials research and nanotechnology. The portfolio includes electron analyzers (PHOIBOS, ASTRAIOS), XPS/NAP-XPS systems (EnviroESCA, EnviroMETROS), LEED and LEEM/PEEM systems, UV sources, ion sources, EFM-series electron beam evaporation sources, detectors as well as measurement and control systems (Nanonis) for SPM and quantum transport. Manufacturing encompasses design, fabrication of parts and components, assembly, quality assurance and specification testing of UHV systems; in addition, custom systems, Analytical Services, repairs, spare parts, training and system relocations are offered. The Business Unit Focus in Hünstetten (formerly FOCUS GmbH) specializes in momentum microscopy (NanoESCA) and deposition sources, with over 2000 installed EFM instruments. Customers come from research, universities, synchrotrons, and the semiconductor, photovoltaic and quantum technology industries. The SPECSGROUP is part of Lab14 (RSBG SE, RAG Foundation) and distributes worldwide through its own locations in Germany, the USA and China as well as an international network of representatives. For almost 30 years, the company has been working with scientists around the world.
- Site
- Berlin
- Processes
- X-ray photoelectron spectroscopy (XPS/ESCA), NAP-XPS (Near Ambient Pressure XPS), HAXPES (µFOCUS 450 with titanium X-ray line), ARPES (angle-resolved photoelectron spectroscopy, 2D momentum mapping), Electron beam evaporation (e-beam evaporation) for thin-film deposition, Ion Beam Assisted Deposition (IBAD), Spin-resolved photoelectron spectroscopy (3D spin detection), Analytical Services (case-based analyses from the product portfolio)
- Materials
- Fe, Co, Cr, Mn, Ni, Pt, Ag, Au
- Certificates
- ISO 9001
- Industries
- Surface analysis and spectroscopy, Materials research, Nanotechnology, Universities and synchrotrons, Semiconductors, Photovoltaics
- 01
Design engineering and custom system development
- 02
Fabrication and procurement of parts and components
- 03
Assembly of UHV systems and components
- 04
Quality assurance and specification testing
- 05
Commissioning, service, training and support
Materials and Processes
Ultrahigh vacuum systems
Design, fabrication, assembly and QA of UHV components and systems for surface analysis.
Electron beam evaporation (e-beam evaporation)
Deposition of high-purity thin films of metals and semiconductors in UHV (down to below 10-10 mbar).
Ion Beam Assisted Deposition
Layer-by-layer growth via controlled assisted deposition (EFM 3i).
X-ray photoelectron spectroscopy (XPS/ESCA)
Non-destructive chemical surface analysis, also at ambient pressure (NAP-XPS, HAXPES).
Angle-resolved photoelectron spectroscopy
2D momentum mapping with k-resolution below 0.003 Å-1 (ASTRAIOS 190).
Locations
Berlin
DEHeadquarters and manufacturing: SPECS Surface Nano Analysis GmbH, Voltastrasse 5, Technology Park Humboldthain
- Materials
- UHV components, electron analyzers, XPS systems, detectors
- EnviroESCA (samples up to Ø 120 mm, 40 mm height)
- PHOIBOS 100/150/225 electron analyzers
- ASTRAIOS 190 ARPES analyzer
- ErLEED 100/150
- FE-LEEM/PEEM P90
- UVS source series
- METIS 1000 / TOF MARIS
- 2D-CMOS detector
Hünstetten
DEBusiness Unit Focus (formerly FOCUS GmbH): momentum microscopy and deposition sources, Neukirchner Str. 2
- Materials
- Electron beam evaporation sources, spin detectors
- EFM series (EFM 3/3s/4/3Ts/3i), 100–3300 °C, UHV below 10-10 mbar
- NanoESCA momentum microscope
- Ferrum VLEED spin detector
Zurich
CHSPECS Zurich GmbH: Nanonis software and electronics development (Technoparkstrasse 1)
- Nanonis measurement and control systems, 6th generation
Mansfield, MA
USSPECS-TII Inc.: sales and service USA
Beijing
CNSPECS-TII Technology Beijing Co., Ltd.: sales and service China
Products and Components
Inside the production
Industries
Processes & technical limits
| Processes | Tolerance | Max. part | Weight | Lot size | Materials |
|---|---|---|---|---|---|
| X-ray photoelectron spectroscopy (XPS/ESCA)Testing | – | – | – | – | Metals, Semiconductors, Polymers, Ceramics, Liquids |
| NAP-XPS (Near Ambient Pressure XPS)Testing | – | – | – | – | – |
| HAXPES (µFOCUS 450 with titanium X-ray line)Testing | – | – | – | – | – |
| ARPES (angle-resolved photoelectron spectroscopy, 2D momentum mapping)Testing | k-resolution < 0.003 Å-1 | – | – | – | – |
| Electron beam evaporation (e-beam evaporation) for thin-film depositionSurface | – | – | – | – | Fe, Co, Cr, Mn, Ni, Pt, Ag, Au, Al, Ti, Ta, W, Silicon, organic molecules |
| Ion Beam Assisted Deposition (IBAD)Surface | – | – | – | – | – |
| Spin-resolved photoelectron spectroscopy (3D spin detection)Testing | Angular resolution ≤ 0.3° | – | – | – | Au, graphene on Ir(111) |
| Analytical Services (case-based analyses from the product portfolio)Testing | – | – | – | – | – |
| Engineering: design, fabrication, assembly and QA of UHV systems and componentsEngineering | – | – | – | – | – |
| Repairs, spare parts, training, system relocations and commissioningAssembly | – | – | – | – | – |
13 Anlagen & Maschinen
| Machine | Manufacturer / model | Quantity | Working area | Year built | Site |
|---|---|---|---|---|---|
| XPS/ESCA ambient-pressure analysis system | SPECS EnviroESCA | – | Samples up to Ø 120 mm and 40 mm height | – | Berlin |
| 2D momentum mapping electron analyzer (ARPES) | SPECS ASTRAIOS 190 | – | Acceptance angle ±30°, analyzer radius 190 mm, pass energy 1–200 eV, kinetic energy 0.5–1500 eV | – | Berlin |
| Electron beam evaporation source (e-beam evaporator) | FOCUS EFM 3 / EFM 3s / EFM 4 / EFM 3Ts / EFM 3i | over 2000 | Temperatures 100 °C – 3300 °C, UHV below 10-10 mbar | – | Hünstetten |
| Electron analyzers (hemispherical energy analyzer) | SPECS PHOIBOS 100/150/225 | – | – | – | Berlin |
| LEED system (ErLEED) | SPECS ErLEED 100 / 150 | – | – | – | Berlin |
| LEEM/PEEM system | SPECS FE-LEEM/PEEM P90 / P90 NAP | – | – | – | Berlin |
| SPM system (scanning probe microscopy) with measurement and control system | Nanonis Nanonis 6th generation | – | – | – | Berlin / Zurich |
| Momentum microscope | FOCUS NanoESCA | – | – | – | Hünstetten |
| UV source (UPS/ARPES) | SPECS UVS 10/35, UVS 300, UVLS | – | – | – | Berlin |
| TOF spectrometer (time-of-flight) | SPECS METIS 1000 / TOF MARIS | – | – | – | Berlin |
| 2D detector with CMOS camera and GPU pulse counting | SPECS 2D-CMOS Detector | – | – | – | Berlin |
| Spin detector (VLEED) | FOCUS Ferrum VLEED | – | – | – | Hünstetten |
| 1D delay-line detector | SPECS/Surface Concept 1D-DLD | – | 124 or 200 parallel channels | – | Berlin |
Additional services
Quality
SPECS operates according to certified quality management (ISO 9001); every system undergoes assembly, quality assurance and specification testing before delivery. Service, repairs and spare parts supply – even for instruments more than 20 years old – ensure long-term operation.
| Evidence | Berlin |
|---|---|
| ISO 9001 |
History
- 1991
Start of EFM evaporator construction by FOCUS; service, spare parts and support for all EFM instruments built since then
SPECS has been building instruments for surface science, materials research and nanotechnology for almost 30 years
- 2024
Business Unit Focus (formerly FOCUS Geräte GmbH, Hünstetten) becomes part of the SPECSGROUP as its latest addition