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Vertical Photonics – Fertigung

Customized VCSELs, VCSEL arrays, LEDs and photodiodes – with cleanroom, assembly and test in Ulm.

Vertical Photonics Logo

Vertical Photonics GmbH

UlmNew on Amplifa

Ulm (Science Park II)Site
R&D up to small seriesManufacturing profile
VCSELs, LEDs, photodiodesProduct portfolio

Photonics engineering from device physics to packaging

Vertical Photonics is a photonics engineering service provider based in Science Park II in Ulm. The company develops and manufactures customized VCSELs and VCSEL arrays, LEDs (visible and NIR) and high-speed photodiodes with spectral coverage from UV to IR. The service portfolio covers the entire stack: device and mask design, custom epitaxial structure design, rapid prototyping, small-volume production, cleanroom services (metal contacts, etching, passivation, wet oxidation, grinding/polishing, dicing), chip-on-board assembly with eutectic and epoxy die attach as well as Au/Al wire and ribbon bonding and flip-chip, packaging in TO cans, on ceramic submounts and in custom housings, and wafer and die test with L-I-V, spectral and beam-profile measurements. Customer industries include data communications, sensing & LiDAR, medical & life sciences, industrial metrology, consumer electronics and defense & aerospace. The target group ranges from research groups that need individual custom devices to OEMs requiring repeatable supply of packaged emitters. Manufacturing takes place in small series with process lock, SPC, reliability stress and full lot traceability.

Site
Ulm
Processes
VCSEL manufacturing (customized single- & multi-mode VCSELs, VCSEL arrays), LED manufacturing (visible & NIR LEDs), Photodiode manufacturing (UV to IR, high bandwidth), Consultancy & advisory (device & package architecture, epi design), Rapid prototyping (short-loop fab & test, L-I-V, spectral, beam profile), Small-volume production (process lock, SPC, lot traceability), Eutectic & epoxy die attach, Au & Al wire bonding, ribbon bonding
Materials
Gold (bond wire), Aluminum (bond wire), Ceramic (submounts), Epoxy (die attach), Eutectic solder material, VCSEL/LED/photodiode semiconductors (III-V compound semiconductors, implicit), Gold, Aluminum
Certificates
Lot traceability & SPC, Reliability stress testing, ISO 9001
Industries
Data Communications, Sensing & LiDAR, Medical & Life Sciences, Industrial Metrology, Consumer Electronics, Defense & Aerospace
  1. 01

    Consulting & specification

  2. 02

    Device and epi design / simulation

  3. 03

    Short-loop fabrication (cleanroom)

  4. 04

    Chip-on-board assembly (die attach, bonding, flip-chip)

  5. 05

    Packaging

  6. 06

    Wafer and die test / characterization

  7. 07

    Small-volume production with qualification

Materials and processes

Au

Gold

Bond wire and ribbon bonding for photonic chip interconnects.

Al

Aluminum

Bond wire material for chip-on-board assembly.

EUT

Eutectic solder material

Die attach with thermally and electrically conductive connection.

EPX

Epoxy

Die attach material for assembly processes.

CER

Ceramic

Submount material for packaging.

SC

III-V semiconductors (VCSEL/LED/photodiode)

Base material of the manufactured photonic devices.

Sites

Standort Ulm

Ulm

DE

Headquarters with cleanroom, assembly & test

Lot size
Prototype to small series
Materials
III-V semiconductors, gold, aluminum, ceramic, epoxy, eutectic solder
  • Cleanroom
  • Lithography / mask alignment
  • Metal evaporation system
  • Wet bench
  • Dicing equipment
  • Wire bonder / die attach
  • Probe station
  • Automated die tester & tape sorter
  • 3D profile measurement system

Components

LEDs on wafer
LEDs on waferSmall-volume production · Photonics
Chip-on-board (wire-bonded VCSEL)
Chip-on-board (wire-bonded VCSEL)Assembly · Data communications / sensing

Inside the production

Lithography – multi-layer mask alignment
Lithography – multi-layer mask alignment
Dicing and wafer singulation
Dicing and wafer singulation
Wire bonding and die attach
Wire bonding and die attach
Optical characterization in the lab
Optical characterization in the lab
Electrical characterization
Electrical characterization
Microscope inspection
Microscope inspection
Consultancy & advisory
Consultancy & advisory
Rapid prototyping
Rapid prototyping

Industries

Data CommunicationsSensing & LiDARMedical & Life SciencesIndustrial MetrologyConsumer ElectronicsDefense & Aerospace

Processes & technical limits

ProcessesToleranceMax. partWeightLot sizeMaterials
VCSEL manufacturing (customized single- & multi-mode VCSELs, VCSEL arrays)Semiconductor/Photonics (manufacture of photonic components)–––Small-volume productionGaAs-based semiconductors (implicit, VCSEL)
LED manufacturing (visible & NIR LEDs)Semiconductor/Photonics––––Semiconductors
Photodiode manufacturing (UV to IR, high bandwidth)Semiconductor/Photonics––––Semiconductors
Consultancy & advisory (device & package architecture, epi design)Engineering–––––
Rapid prototyping (short-loop fab & test, L-I-V, spectral, beam profile)Engineering–––––
Small-volume production (process lock, SPC, lot traceability)Semiconductor/Photonics–––––
Eutectic & epoxy die attachJoining––––Semiconductor chips
Au & Al wire bonding, ribbon bondingJoining––––Gold, Aluminum
Flip-chip assemblyJoining––––Semiconductor chips
Hermetic & non-hermetic packaging (TO cans, ceramic submounts, custom housings)Assembly–––small-series productionCeramic, Metal
Metal contacts / metal evaporationSurface––––Metals
EtchingSemiconductor process technology–––––
PassivationSemiconductor process technology–––––
Wet thermal oxidationSemiconductor process technology–––––
Grinding & polishingSurface–––––
Dicing & wafer singulationSemiconductor process technology–––––
Lithography — multi-layer mask alignmentSemiconductor process technology–––––
Wet bench processingSemiconductor process technology–––––
Custom epitaxial structure designEngineering–––––
Device & mask design (custom LED & VCSEL layouts)Engineering–––––
Wafer & die test (probe-station characterization, automated L-I-V, spectral, beam profile)Testing–––––
Electrical characterizationTesting–––––
Optical characterizationTesting–––––
Automated die testing & tape sortingTesting–––––
Microscope inspectionTesting–––––
3D profile measurementsTesting–––––
Cleanroom services (full photonics device processing stack)Semiconductor process technology–––––
Collaborative engineering & co-developmentEngineering–––––

9 Anlagen & Maschinen

MachineManufacturer / modelQuantityWorking areaYear builtSite
Cleanroom (controlled-environment processing)––––Ulm
Probe station (wafer/die test)––––Ulm
Lithography / mask alignment system––––Ulm
Metal evaporation system––––Ulm
Wet bench––––Ulm
Dicing equipment (wafer singulation)––––Ulm
Wire bonder / die attach equipment––––Ulm
3D profile measurement system––––Ulm
Automated die tester & tape sorter––––Ulm

Additional services

Consultancy & advisory (device physics, roadmap, due diligence, qualification strategy)Rapid prototypingSmall-volume productionChip-on-board & assembly (die attach, wire/ribbon bonding, flip-chip)Cleanroom services (metal contacts, etching, passivation, wet oxidation, grinding/polishing, dicing)Custom epitaxial structure designDevice & mask designWafer-level & packaged test (L-I-V, spectral, beam profile)Packaging (TO cans, ceramic submounts, custom housings)Electrical & optical characterizationAutomated die testing & tape sorting3D profile measurements

Quality and traceability

Every device is characterized and documented – with L-I-V curves, spectra, reliability stress and complete lot documentation. Small-volume production includes process lock, qualification, SPC and full lot traceability at the quality level of high-volume manufacturing.

EvidenceUlm
Lot traceability & SPC
Reliability stress testing
ISO 9001
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